[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/TEEM.2004.5.4.161

Analysis of Ozone Concentration by TD and Q-mass Method

Lee, Dong-Gyu (Department of Electrical Engineering, Kwangwoon University)
Lee, Joon-Ung (Department of Electrical Engineering, Kwangwoon University)

Publication Information

Transactions on Electrical and Electronic Materials / v.5, no.4, 2004 , pp. 161-165 More about this Journal

Abstract

In order to get oxidizing power enough for growth of a superconductive thin film with oxide gas, concentrated ozone was used. As a method for concentrating ozone, a method for concentrating ozone by adsorbing ozone selectively into silica-gel beads is adopted, and this concentration is analyzed by the ultraviolet absorption method, the thermal decomposition method and the Q-mass analyzing method. Thermal decomposition method is most effective for measurement of a high concentration of ozone. Ozone as concentrated by the adsorption method got to have a concentration of 97 mol % at the maximum, and it was identified that the concentration of the ozone gas was stable for the time while a thin film was formed.

Keywords

Ozone condensation system; Quadrupole mass(Q-mass) analyzing method; Ultraviolet absorption method; Thermal decomposition method;

Citations & Related Records

Reference

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