Electrical Characteristics of SiO2/4H-SiC Metal-oxide-semiconductor Capacitors with Low-temperature Atomic Layer Deposited SiO2 |
Jo, Yoo Jin
(Department of Advanced Materials Engineering, Hanyang University)
Moon, Jeong Hyun (Power Semiconductor Research Center, High Voltage Direct Current Research Division, Korea Electrotechnology Research Institute) Seok, Ogyun (Power Semiconductor Research Center, High Voltage Direct Current Research Division, Korea Electrotechnology Research Institute) Bahng, Wook (Power Semiconductor Research Center, High Voltage Direct Current Research Division, Korea Electrotechnology Research Institute) Park, Tae Joo (Department of Advanced Materials Engineering, Hanyang University) Ha, Min-Woo (Department of Electrical Engineering, Myongji University) |
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