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http://dx.doi.org/10.5573/JSTS.2015.15.5.533

Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy  

Ryu, Seon Young (Division of Scientific Instrumentation, Korea Basic Science Institute)
Choi, Hae Young (Division of Scientific Instrumentation, Korea Basic Science Institute)
Kim, Dong Uk (Division of Scientific Instrumentation, Korea Basic Science Institute)
Kim, Geon Hee (Division of Scientific Instrumentation, Korea Basic Science Institute)
Kim, Taehyun (National NanoFab Center)
Kim, Hee Yeoun (National NanoFab Center)
Chang, Ki Soo (Division of Scientific Instrumentation, Korea Basic Science Institute)
Publication Information
JSTS:Journal of Semiconductor Technology and Science / v.15, no.5, 2015 , pp. 533-538 More about this Journal
Abstract
Thermal characterization of individual pixels in microbolometer infrared image sensors is needed for optimal design and improved performance. In this work, we used thermoreflectance microscopy on uncooled microbolometer image sensors to investigate the thermal characteristics of individual pixels. Two types of microbolometer image sensors with a shared-anchor structure were fabricated and thermally characterized at various biases and vacuum levels by measuring the temperature distribution on the surface of the microbolometers. The results show that thermoreflectance microscopy can be a useful thermal characterization tool for microbolometer image sensors.
Keywords
Microbolometer; infrared image sensor; thermoreflectance microscopy; thermal characterization;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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