Novel Robust Structure and High k Dielectric Material for 90 nm DRAM Capacitor |
Park, Y.K.
(Advanced Technology Development, Semiconductor R & D Center, Samsung Electronics Co.)
Y.S. Ahn (Advanced Technology Development, Semiconductor R & D Center, Samsung Electronics Co.) Lee, K.H. (Advanced Technology Development, Semiconductor R & D Center, Samsung Electronics Co.) C.H. Cho (Advanced Technology Development, Semiconductor R & D Center, Samsung Electronics Co.) T.Y. Chung (Advanced Technology Development, Semiconductor R & D Center, Samsung Electronics Co.) Kim, Kinam (Advanced Technology Development, Semiconductor R & D Center, Samsung Electronics Co.) |
1 | Y.J. Park and Kinam Kim, J. Korean Phys. Soc. 41, 884 (2002) |
2 | H.S. Jeong, W.S. Yang, Y.S. Hwang, C.H. Cho, S. Park, S.J. Ahn, Y.S. Chun, S.H. Shin, S.H. Song, J.Y. Lee, S.M. Jang, C.H. Lee, J.H. Jeong, M.H. Cho, J.K. Lee and Kinam Kim, IEDM Tech. Dig., p.353-356 (2000) DOI |
3 | K.N. Kim, T.Y. Chung, H.S. Jeong, J.T. Moon, Y.W. Park, G.T. Jeong, K.H. Lee, G.H. Koh, D.W. Shin, Y.S. Hwang, D.W. Kwak, H.S. Uh, D.W. Ha, J.W. Lee, S.H. Shin, M.H. Lee, Y.S. Chun, J.K. Lee, B.J. Park, J.H. Oh, J.G. Lee and S.H. Lee, Symp. on VLSI Tech., p.10-11(2000) |
4 | Jaegoo Lee, Changhyun Cho, Juyong Lee, Minsang Kim, Jaekyu Lee, Sooho Shin, Donghwa Kwak, Kwanhyeob Koh, Gitae Jeong, Hongsik Jeong, Taeyoung Chung and Kinam Kim, J. Korean Phys. Soc. 41, 487 (2002) |
5 | Jeong-Hoon Oh, Hoon Jeong, J.M. Park, J.Y. Park, K.H. Hong, Y.J. Choi, K.H. Lee, T.Y. Chung, |
6 | K.N. Kim, H.S. Jeong, W.S. Yang, Y.S. Hwang, C.H. Cho, M.M. Jeong, S. Park, SJ. Ahn, Y.S. Chun, S.H. Shin, J.S. Park, S.H. Song, J.Y. Lee, S.M. Jang, C.H. Lee, J.H. Jeong, M.H. Cho, h.I. Yoon and J.S. Jeon, Symp. on VLSI Tech., p.7-8(2001) |
7 | Kinam Kim and Moon-Young Jeong, IEEE Trans. Semiconductor Manufacturing 15, 137 (2002) DOI ScienceOn |
8 | Kinam Kim, Chang-Gyu Hwang and Jong-Gil Lee, IEEE Trans. Electron Dev. 45, 598 (1998) DOI ScienceOn |