Data Retention Time and Electrical Characteristics of Cell Transistor According to STI Materials in 90 nm DRAM |
Shin, S.H.
(Semiconductor R&D Center, Samsung Electronics Company., Ltd.)
Lee, S.H. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Kim, Y.S. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Heo, J.H. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Bae, D.I. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Hong, S.H. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Park, S.H. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Lee, J.W. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Lee, J.G. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Oh, J.H. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Kim, M.S. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Cho, C.H. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Chung, T.Y. (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) Kim, Ki-Nam (Semiconductor R&D Center, Samsung Electronics Company., Ltd.) |
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