Analysis of Electrical Properties of Ti/Pt/Au Schottky Contacts on (n)GaAs Formed by Electron Beam Deposition and RF Sputtering |
Sehgal, B-K
(Solid State Physics Laboratory)
Balakrishnan, V-R (Solid State Physics Laboratory) R Gulati (Solid State Physics Laboratory) Tewari, S-P (Department of Physics, University of Delhi) |
1 | B.K.Sehgal, B.Bhattacharya, S.Vinayak and R.Gulati, Thin Solid Films, 330, 146 (1998) DOI ScienceOn |
2 | H.K.Henisch, Semiconductor contacts, Oxford Univ. Press. (1984) |
3 | M.Forment, R.L.V.Meirhaeghe, A.D.Vrieze, K.Strubbe and W.P.Gomes, Semicond. Sci. Technol., 16, 975 (2001) DOI ScienceOn |
4 | S.Dhar, V.R.Balakrishnan, V.Kumar and S.Ghosh, IEEE Trans. Electron Dev., 47, 282 (2000) DOI ScienceOn |
5 | F.A.Padovani, Semiconductors and semi-metals (ed. Wilardson RK, Beer AC ) NY, Academic Press (1971) |
6 | J.Tersoff, Phys. Rev., B35, 6182 (1987) DOI ScienceOn |
7 | R.F.Schmitsdroff, T.U.Kampen and W.Monch, J. Vac. Sci. Technol., B15, 1221 (1997) DOI ScienceOn |
8 | M.K.Hudait, P.Venkateswarlu and S.B.Krupanidhi, Solid State Electron., 45, 133 (2001) DOI ScienceOn |
9 | S.Ashok, J.M.Borego and R.J.Gutman, Solid State Electron., 22, 621 (1979) DOI ScienceOn |
10 | Zs.Horwvath, Mater. Res. Soc. Symp. Proc, 260, 359 (1992) |
11 | I.Ohdomari and K.N.Tu, J. Appl. Phys., 51, 3735 (1980) DOI ScienceOn |
12 | S.Zhu, R.L.V.Meirhaeghe, C.Detavernier, F.Cardon, G.Ru and B.Z.Li, Solid State Electron., 44, 663 (2000) DOI ScienceOn |
13 | J.H.Werner and H.H.Guttler, J. Appl. Phys., 73 1315 (1993) DOI |
14 | H.Palm, M.Arbes and M.Schulz, Phys. Rev. Lett., 71, 2224 (1993) DOI ScienceOn |
15 | S.Chand and J.Kumar, Semicond. Sci. Technol., 12, 899 (1997) DOI ScienceOn |
16 | P.Revva, J.M.Langer, M.Missous and A.R.Peaker, J.Appl. Phys., 74, 416 (1993) DOI ScienceOn |
17 | A.Olbrich, J.Vancea, F.Kreupl and H.Hoffman, J. Appl. Phys., 83, 358 (1998) DOI ScienceOn |
18 | G.M.Vanalme, L.Goubert, R.L.V.Meirhaeghe, F.Cardon and P.V.Daele, Semicond. Sci. Technol., 14, 871 (1999) DOI ScienceOn |
19 | A.Gumus, A.Turut and N.Yalcin, J. Appl. Phys., 91, 245 (2002) DOI ScienceOn |
20 | Y.P.Song, R.L.V.Meirhaeghe, W.T.Laflere and F.Cardon, Solid State Electron., 29, 633 (1986) DOI ScienceOn |
21 | J.R.Waldrop, Appl. Phys. Lett., 44, 1002 (1984) DOI ScienceOn |
22 | J.H.Werner and H.H.Guttler, J. Appl. Phys., 69, 1522 (1991) DOI |
23 | R.T.Tung, Appl. Phys. Lett., 58, 2821 (1991) DOI |
24 | E.Grussel, S.Berg and L.P.Andersson, J. Electrochem. Soc., 127, 1571 (1980) DOI |
25 | R.T.Tung, Phys. Rev., B45, 13509 (1992) DOI ScienceOn |
26 | S.J.Fonash, S.Ashok and S.Singh, Appl. Phys. Lett., 39, 423 (1981) DOI |
27 | K.Maeda, H.Ikoma, K.Sato and T.Ishida, Appl. Phys. Lett., 62, 2560 (1993) DOI ScienceOn |
28 | H.Ikoma, T.Ishida, K.Sato, T.Ishikawa and K.Maeda, J. Appl. Phys., 73, 1272 (1993) DOI |
29 | H.W.Hubers and H.P.Roser, J. Appl. Phys., 84, 5826 (1998) DOI |
30 | V.W.L.Chin, M.A.Green and J.W.V.Storey, J. Appl. Phys., 68, 3470 (1990) DOI |
31 | W.J.Devlin, Electronics lett., 16, 92 (1980) DOI |
32 | E.H.Rhoderick, R.H.Williams, Metal-Semiconductor Contacts, Oxford, Clarendon Press (1988) |
33 | B.L.Sharma, Metal-Semiconductor Schottky Barrier Junctions and their applications (ed. B.L.Sharma), New York, Plenum (1984) |
34 | S.M.Sze, Physics of Semiconductor Devices 2nd ed., New York, Wiley (1981) |
35 | S.P.Kwok, J. Vac. Sci. Technol., B4, 1383 (1986) DOI |
36 | F.D.Auret, S.A.Goodman, Y.Leclerc, G.Myburg and C.Schutte, Materials Science and Technology, 13, 945 (1997) DOI |
37 | A.Cola, M.G.Lupo, L.Vasanelli and A.Valentini, J. Appl. Phys., 71, 4966 (1992) DOI |
38 | A.Zussman, J. Appl. Phys., 59, 3894 (1986) DOI |
39 | M.D.Dio, A.Cola, M.G.Lupo and L.Vasanelli, Solid State Electron., 38, 1923 (1995) DOI ScienceOn |
40 | B.K.Sehgal, R.Gulati, A.A.Naik, S.Vinayak, D.S.Rawal, H.S.Sharma, Materials Science and Engineering B48, 229 (1997) DOI ScienceOn |
41 | Y.T.Kim, C.W.Lee, and D.J.Kim, Appl. Phys. Lett., 72, 1507 (1998) DOI ScienceOn |