Monolithically Integrable RF MEMS Passives |
Park, Eun-Chul
(Department of Electrical Engineering and Computer Science(Division of Electrical Engineering) Korea Advanced Institute of Science and Technology)
Park, Yun-Seok (Department of Electrical Engineering and Computer Science(Division of Electrical Engineering) Korea Advanced Institute of Science and Technology) Yoon, Jun-Bo (Department of Electrical Engineering and Computer Science(Division of Electrical Engineering) Korea Advanced Institute of Science and Technology) Euisik Yoon (Department of Electrical Engineering and Computer Science(Division of Electrical Engineering) Korea Advanced Institute of Science and Technology) |
1 | Y.-J, Kim, Mark G. Allen, 'Surface Micromachined Solenoid Inductors for High Frequency Applications,' IEEE. Trans. Components, packaging, and manufacturing Tech., Part C, vol.21, No.1, Jan. 1998 DOI ScienceOn |
2 | B. Kleveland, et al., 'Exploiting CMOS Reverse Interconnect Scaling in Multigigahertz Amplifier and Oscillator Design,' IEEE Journal of Solid-State Circuits, vol. 36, No. 10, Oct. 2001 DOI ScienceOn |
3 | J.-B. Yoon, C.-H. Han, E. Yoon and C.-K. Kim, 'Monolithic Integration of 3-D Electoplated Microstructures of Unlimited Number of Levels Using Planarization With a Sacrificial Metallic Mold (PSMM),' IEEE MEMS '99 Tech. Dig., pp.624-629, Jan. 1999 DOI |
4 | Y.-S. Choi, J.-B. Yoon, B.-I. Kim, Y. Eo, and E. Yoon, 'A High-Performance MEMS Transformer for Silicon RF ICs,' IEEE Int. MEMS Conf. Tech. Dig., pp. 653-656, Jan. 2002 DOI |
5 | A. Dec, K. Suyama, 'Micromachined Electro-Mechanically Tunable Capacitors and Their Applications to RF IC's,' IEEE Transactions on Microwave Theory and Techniques, vol. 46, no. 12, pp.2587-2596, Dec. 1998 DOI ScienceOn |
6 | J. Hartung, 'Integrated Passive Components in MCM-Si Technology and their Application in RF-Systems,' Int.Conf. on Multichip Modules and High Density Packaging, pp. 256-261, 1998 DOI |
7 | J.-B. Yoon, Y.-S. Choi, B.-I. Kim, Y. Eo, and E. Yoon, 'CMOS-compatible, surface micromachined, suspended spiral inductors and their proper model for multi-GHz silicon RF IC's,' submitted to IEEE Electron Device Lett DOI ScienceOn |
8 | J. R. Long, ' Monolithic Transformer for Silicon RF IC Design,' IEEE J. Solid-State Circuits, vol. 35, pp. 1368-1382, Sep. 2000 DOI ScienceOn |
9 | J.-B. Yoon, B.-I. Kim, Y.-S. Choi, and E. Yoon, '3-D Lithography and Metal Surface Micromachining for RF and Microwave MEMS,' IEEE Int. MEMS Conf. Tech. Dig., pp. 673-676, Jan. 2002 DOI |
10 | J.-B. Yoon, C.-H. Han, E. Yoon, and C.-K. Kim, 'Monolithic fabrication of electroplated solenoid inductors using three-dimensional photolithography of a thick photoresist,' Jpn. J. Appl. Phys., vol. 37, pt. 1, no. 12B, pp. 7081-7085, Dec. 1998 DOI |
11 | L. E. Larson, 'Microwave MEMS Technology for Next-Generation Wireless Communications,' MTT-S, pp. 1073-1076, 1999 DOI |
12 | C. T.-C. Nguyen, et al., 'Micromachined devices for wireless communications,' Proceedings of The IEEE, vol. 86, pp. 1756-1768, Aug. 1998 DOI ScienceOn |