1 |
G. Pappas, J. Lygeros, and D. Godbole, "Stabilization and tracking of feedback linearizable systems under input constraints," Proc. of the 34th IEEE Conf. on Decision and Control, pp. 596-601, 1995
|
2 |
J. L. Aguilar, R. A. Garcia, and C. E. D'attellis, "Exact linearization of nonlinear systems: trajectory tracking with bounded controls and state constraints," International Journal of Control, vol. 65, no. 3, pp. 455-467, 1996
DOI
ScienceOn
|
3 |
S. A. Norman and S. P. Boyd, "Multivariable feedback control of semiconductor wafer temperature," Proc. of American Control Conference, pp. 811-816, 1992
|
4 |
Y. M. Cho and P. Gyugyi, "Control of rapid thermal processing: A system theoretic approach," IEEE Trans. on Control Systems Technology, vol. 5, no. 6, pp. 644-653, 1997
DOI
ScienceOn
|
5 |
J. Y. Choi and H. Y. Do, "A learning approach of wafer temperature control in a rapid thermal processing system," IEEE Trans. on Semiconductor Manufacturing, vol. 14, no. 1, pp. 1-10, 2001
DOI
ScienceOn
|
6 |
J. Baker and P. D. Christofides, "Output feedback control of parabolic PDE system with nonlinear spatial differential operators," Ind. Eng. Chem. Res. vol. 38, pp. 4372-4380, 1999
DOI
ScienceOn
|
7 |
H. Aling, J. Abedor, J. L. Ebert, A. Emami- Naeini, and R. L. Kosut, "Application of feedback linearization to models of rapid thermal processing (RTP) reactors," Proc. of the 3rd Int'l Rapid Thermal Processing Conference, pp. 356-366, 1995
|
8 |
H. A. B. te Braake, M. Ayala Botto, H. J. L. van Can, J. Sa da Costa, H. B. Verbruggen, "Linear predictive control based on approximate inputoutput feedback linearization," IEE Proc. Control Theory and Applications, vol. 146, no. 4, pp. 295-300, 1999
|
9 |
M. Henson and M. Kurtz, "Input-output linearization of constrained nonlinear processes," Proc. of AIChE Annual Meeting, San Francisco, pp. 1-20, 1994
|
10 |
K. W. Gwak and G. Y. Masada, "Regularization embedded nonlinear control designs for illconditioned thermal processes," ASME Journal of Dynamics Systems, Measurements and Control, vol. 126, no. 3, pp. 574-582, 2004
DOI
ScienceOn
|
11 |
C. D. Schaper, T. Kailath, and Y. J. Lee, "Decentralized control of wafer temperature for multizone rapid thermal processing systems," IEEE Trans. on Semiconductor Manufacturing, vol. 12, no. 2, pp. 193-199, 1999
DOI
ScienceOn
|
12 |
P. Yip and J. Hedrick, "Controller design for nonlinear systems under input constraints," Proc. of ASME Dynamic Systems and Control Division, pp. 359-363, 1995
|
13 |
R. Okabayashi and K. Furuta, "Design of sliding mode control systems with constrained inputs," Proc. the 35th IEEE Conf. on Decision and Control, pp. 3492-3497, 1996
|
14 |
K. S. Balakrishnan, W. Cho, and T. F. Edgar, "Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor," SPIE, vol. 2336, pp. 70-80, 1994
|
15 |
M. Botto, T. V. D. Boom, A. Krijgsman, and J. S. D. Costa, "Predictive control based on neural network models with I/O feedback linearization," International Journal of Control, vol. 72, no. 17, pp. 1538-1554, 1999
DOI
ScienceOn
|
16 |
M. Kurtz, G.-Y. Zhu, and M. Henson, "Constrained output feedback control of a multivariable polymerization reactor," IEEE Trans. on Control Systems Technology, vol. 8, no. 1, pp. 87-97, 2000.
DOI
ScienceOn
|
17 |
H. Erturk, O. A. Ezekoye, and J. R. Howell, "Inverse transient boundary condition estimation problem in a radiating enclosure," Proc. of ASME National Heat Transfer Congress, 2001
|
18 |
K. S. Balakrishinan and T. F. Edgar "Modelbased control in rapid thermal processing," Thin Solid Films, vol. 365, no. 2, pp. 322-333, 2000
DOI
ScienceOn
|
19 |
T. Breedijk, T. F. Edgar, and I. Trachtenberg, "Model-Based Control of Rapid Thermal Processes," Proc. of American Control Conference, pp. 887-891, 1994
|
20 |
K. S. Balakrishinan and T. F. Edgar "Modelbased control in rapid thermal processing," Thin Solid Films, vol. 365, no. 2, pp. 322-333, 2000
DOI
ScienceOn
|
21 |
Y.-S. Lu and J.-S. Chen, "Design of a global sliding-mode controller for a motor drive with bounded control," International Journal of Control, vol. 62, no. 5, pp. 1001-1019, 1995
DOI
ScienceOn
|
22 |
S. Qin and T. Badgwell, "A survey of industrial model predictive control technology," Control Engineering Practice, vol. 11, no. 7, pp. 733-764, 2003
DOI
ScienceOn
|
23 |
M. Kurtz and M. Henson, "Feedback linearzing control of discrete-time nonlinear systems with input constraints," International Journal of Control, vol. 70, no. 4, pp. 603-616, 1998
DOI
|
24 |
N. Kapoor and P. Daoutidis, "An observer-based anti-windup scheme for non-linear systems with input constraints," International Journal of Control, vol. 72, no. 1, pp. 18-29, 1999
DOI
ScienceOn
|
25 |
H. M. Park, T. Y. Yoon, and O. Y. Kim, "Optimal control of rapid thermal processing systems by empirical reduction of modes," Ind. Eng. Chem. Res., vol. 38, pp. 3964-3975, 1999
DOI
ScienceOn
|
26 |
K.-K. Shyu and H.-Y. Lin, "Adaptive sliding mode control for variable structure systems with constraint control input," Dynamics and Control, vol. 6, pp. 49-61, 1996
DOI
|
27 |
M. Soroush and S. Valluri, "Calculation of optimal feasible controller output in multivariable processes with input constraints," Proc. of American Control Conf., vol. 5, pp. 3475-3479, 1997
|
28 |
T. Kendi and F. Doyle III, "Nonlinear internal model control for systems with measured disturbances and input constraints," Industrial and Engineering Chemistry Research, vol. 37, pp. 489-505, 1998
DOI
ScienceOn
|
29 |
M. Kurtz, and M. Henson, "Input-output linearizing control of constrained nonlinear processes," Journal of Process Control, vol. 7, no. 1, pp. 3-17, 1997
DOI
ScienceOn
|
30 |
C. J. Huang, C. C. Yu, and S. H. Shen, "Selection of measurement locations for the control of rapid thermal processor," Automatica, vol. 36, pp. 705-715, 2000
DOI
ScienceOn
|