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Tolerance design of position accuracy of optical components for micro optical system  

이재영 (인하대학교 정보통신공학부)
황병철 (인하대학교 정보통신공학)
박헌용 (인하대학교 정보통신공학)
박세근 (인하대학교 정보통신공학)
이승걸 (인하대학교 정보통신공학)
오범환 (인하대학교 정보통신공학)
이일항 (인하대학교 정보통신공학)
최두선 (한국기계연구원 나노 공정그룹)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.41, no.7, 2004 , pp. 13-20 More about this Journal
Abstract
In order to set up the design of micro optical bench, optical coupling efficiencies of two sets of test benches are calculated. Simple linear connections of incoming and outgoing optical fibers with and without ball lenses are designed. Positional errors that are possible in actual fabrication processes we considered in the calculations and their tolerances are determined from -3 ㏈ conditions. For a simple fiber-to-fiber connection, the lateral misalignment should be limited to 2.7 um and tilt error 5.8o. In case of the fiber-to-fiber with ball lens, the working distance between fibers can be extended over 60 um. The optical coupling efficiency depends strongly on the positional errors of ball lenses along the optical axis, and it is also found that the lateral and vertical positional errors should be considered simultaneously in order to keep the high coupling efficiency.
Keywords
Micro optical bench; Robustic design; Fiber-to-Fiber connection;
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