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A Study on MgF$_2$/CeO$_2$ AR Coating of Mono-Crystalline Silicon Solar Cell  

유진수 (성균관대학 정보통신공학부)
이재형 (군산대학 전자정보공학부)
이준신 (성균관대학 정보통신공학부)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.52, no.10, 2003 , pp. 447-450 More about this Journal
Abstract
This paper presents a process optimization of antireflection (AR) coating on crystalline Si solar cells. Theoretical and experimental investigations were performed on a double-layer AR (DLAR) coating of MgF$_2$/CeO$_2$. We investigated CeO$_2$ films as an AR layer because they have a proper refractive index of 2.46 and demonstrate the same lattice constant as Si substrate. RF sputter grown CeO$_2$ film showed strong dependence on a deposition temperature. The CeO$_2$ deposited at 40$0^{\circ}C$ exhibited a strong (111) preferred orientation and the lowest surface roughness of 6.87 $\AA$. Refractive index of MgF$_2$ film was measured as 1.386 for the most of growth temperature. An optimized DLAR coating showed a reflectance as low as 2.04% in the wavelengths ranged from 0.4${\mu}{\textrm}{m}$ to 1.1${\mu}{\textrm}{m}$. We achieved the efficiencies of solar cells greater than 15% with 3.12% improvement with DLAR coatings. Further details on MgF$_2$, CeO$_2$ films, and cell fabrication parameters are presented in this paper.
Keywords
Cz Si wafer; AR coating; MgF$_2$; CeO$_2$; Fire-through; Texturing; Refractive index; Reflectance;
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  • Reference
1 D. Huang, F. Qin, Z. Ren, and L. Lin, Appl. Phys. Lett. Vol 67, No.25, 18 December, 1995   DOI
2 K.L. Chopra and S.R. Das, Thin Film Solar Cells, Plenum Press, p515-520, 1983
3 Z. Chen, P. Sana, J. Salami, and A. Rohagi, IEEE Trans. Electron Devices, Vol 40 , No.9, September, 1993
4 J. Zahao, A. Wang, and M. A. Green, IEEE Trans. Electron Devices, Vol 41, No.9, September, 1994   DOI   ScienceOn
5 M. A. Green, A. W. Blaker, J. Zhao, A. M. Milne, A. Wang, and Ximing Dai, IEEE Trans. Electron Devices, Vol.37, No. 2, February, 1990   DOI   ScienceOn
6 J. Zahao and M. A. Green, IEEE Trans. Electron Devices, Vol 38 , No.8, August, 1991   DOI   ScienceOn