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http://dx.doi.org/10.7779/JKSNT.2016.36.1.1

Comparison of Slowness Profiles of Lamb Wave with Elastic Moduli and Crystal Structure in Single Crystalline Silicon Wafers  

Min, Youngjae (Applied Acoustics Lab, Korea Science Academy of KAIST)
Yun, Gyeongwon (Applied Acoustics Lab, Korea Science Academy of KAIST)
Kim, Kyung-Min (Applied Acoustics Lab, Korea Science Academy of KAIST)
Roh, Yuji (Applied Acoustics Lab, Korea Science Academy of KAIST)
Kim, Young H. (Applied Acoustics Lab, Korea Science Academy of KAIST)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.36, no.1, 2016 , pp. 1-8 More about this Journal
Abstract
Single crystalline silicon wafers having (100), (110), and (111) directions are employed as specimens for obtaining slowness profiles. Leaky Lamb waves (LLW) from immersed wafers were detected by varying the incident angles of the specimens and rotating the specimens. From an analysis of LLW signals for different propagation directions and phase velocities of each specimen, slowness profiles were obtained, which showed a unique symmetry with different symmetric axes. Slowness profiles were compared with elastic moduli of each wafer. They showed the same symmetries as crystal structures. In addition, slowness profiles showed expected patterns and values that can be inferred from elastic moduli. This implies that slowness profiles can be used to examine crystal structures of anisotropic solids.
Keywords
Silicon Single Crystal; Crystal Structure; Slowness; Lamb Wave; Elastic Constants;
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Times Cited By KSCI : 1  (Citation Analysis)
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