Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Impedance Matching Characteristic Research Utilizing L-type Matching Network

  • Jun Gyu Ha (Department of Electronics Engineering, Myongji University) ;
  • Bo Keun Kim (Department of Electrical Engineering, Myongji University) ;
  • Dae Sik Junn (Department of Semiconductor Engineering, Myongji University)
  • Received : 2023.06.02
  • Accepted : 2023.06.21
  • Published : 2023.06.30
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Abstract

If an impedance mismatch occurs between the source and load in a Radio Frequency transmission system, reflected power is generated. This results in incomplete power transmission and the generation of Reflected Power, which returns to the Radio Frequency generator. To minimize this Reflected Power, Impedance matching is performed. Fast and efficient Impedance matching, along with converging reflected power towards zero, is advantageous for achieving desired plasma characteristics in semiconductor processes. This paper explores Impedance matching by adjusting the Vacuum Variable Capacitor of an L-type Matching Module based on the trends observed in the voltage of the Phase Sensor and Electromotive Force voltage. After assessing the impedance matching characteristics, the findings are described.

Keywords

Acknowledgement

This research is the result of an undergraduate industry academia project supported by the Semiconductor Major Track Program. We would like to express our gratitude to Professor Dae Sik Junn from the Department of Semiconductor Engineering for his support in setting up the RF equipment and providing valuable advice throughout the research process.

References

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