열처리공학회지 (Journal of the Korean Society for Heat Treatment)

  • 제36권3호
  • /
  • Pages.137-144
  • /
  • 2023
  • /
  • 1225-1070(pISSN)
  • /
  • 2508-4046(eISSN)
한국열처리공학회 (The Korean Society for Heat Treatment)
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포토리소그래피 공정에 의한 마이크로 패턴 제작과 tribology 특성 연구

A Study on Micropattern Fabrication and Tribology Characteristics by Photolithography Process

  • 장태환 (부산대학교 나노메카트로닉스공학과) ;
  • 박진혁 (부산대학교 나노메카트로닉스공학과) ;
  • 권영우 (부산대학교 나노융합기술학과) ;
  • 조보람 (한국생산기술연구원 대경지역본부 스마트제조기술연구그룹) ;
  • 김태규 (부산대학교 나노메카트로닉스공학과)
  • T.H. Jang (Dept. of Nanomechatronics Engineering, Pusan National University) ;
  • J.H. Park (Dept. of Nanomechatronics Engineering, Pusan National University) ;
  • Y.W. Kwon (Department of Nanofusion Technology, Pusan National University) ;
  • B.R. Cho (KITECH, Daegyeong Division, Smart Manufacturing Technology R&D Group) ;
  • T.G. Kim (Dept. of Nanomechatronics Engineering, Pusan National University)
  • 투고 : 2023.05.11
  • 심사 : 2023.05.17
  • 발행 : 2023.05.30
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초록

Micro electro mechanical systems (MEMS) and precision machines require excellent friction and wear characteristics to improve energy efficiency generated during sliding motion. In this study, DLC thin film with high hardness and low friction was deposited on STS304 substrate material by CVD method, and dot-shaped convex and concave micropatterns were fabricated by photolithography process. The diameter of the pattern was 20 ㎛, the pitch was 40 ㎛, and a pattern having a mesh type arrangement was fabricated and an abrasion test was performed. The results of the wear test on the micro pattern confirmed that the friction coefficient characteristics were improved compared to STS 304 and DLC thin films. In addition, in this result, the micro-pattern showed 11.4% more improved friction coefficient than the DLC thin film. The friction coefficient characteristics for convex and concave patterns of the same size showed almost similar results.

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과제정보

본 과제는 부산대학교 기본연구지원사업(2년)에 의하여 연구되었음.

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