Acknowledgement
이 논문은 과학기술정보통신부 재원으로 한국연구재단-나노·소재기술개발사업(2021M3H4A3A01055840, "초정밀 고분해능 자외선 광학결정 렌즈 원천기술 개발") 및 산업통상자원부 재원으로 한국산업기술평가관리원(No. 1415177869, "patterned wafer의 초미세 불량 분석 검출 장비 개발")의 지원을 받아 수행된 연구임.
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