Particle and aerosol research (한국입자에어로졸학회지)

Korean Association for Particle and Aerosol Research (한국입자에어로졸학회)
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CFD simulation of cleaning nanometer-sized particulate contaminants using high-speed injection of micron droplets

초고속 미세 액적 충돌을 이용한 나노미터 크기 입자상 오염물질의 세정에 대한 CFD 시뮬레이션

  • Jinhyo, Park (School of Mechanical Engineering, Pusan National University) ;
  • Jeonggeon, Kim (School of Mechanical Engineering, Pusan National University) ;
  • Seungwook, Lee (School of Mechanical Engineering, Pusan National University) ;
  • Donggeun, Lee (School of Mechanical Engineering, Pusan National University)
  • 박진효 (부산대학교 기계공학부) ;
  • 김정건 (부산대학교 기계공학부) ;
  • 이승욱 (부산대학교 기계공학부) ;
  • 이동근 (부산대학교 기계공학부)
  • Received : 2022.09.14
  • Accepted : 2022.11.05
  • Published : 2022.12.31
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Abstract

The line width of circuits in semiconductor devices continues to decrease down to a few nanometers. Since nanoparticles attached to the patterned wafer surface may cause malfunction of the devices, it is crucial to remove the contaminant nanoparticles. Physical cleaning that utilizes momentum of liquid for detaching solid nanoparticles has recently been tested in place of the conventional chemical method. Dropwise impaction has been employed to increase the removal efficiency with expectation of more efficient momentum exchange. To date, most of relevant studies have been focused on drop spreading behavior on a horizontal surface in terms of maximum spreading diameters and average spreading velocity of drop. More important is the local liquid velocity at the position of nanoparticle, very near the surface, rather than the vertical average value. In addition, there are very scarce existing studies dealing with microdroplet impaction that may be desirable for minimizing pattern demage of the wafer. In this study, we investigated the local velocity distribution in spreading liquid film under various impaction conditions through the CFD simulation. Combining the numerical results with the particle removal model, we estimated an effective cleaning diameter (ECD), which is a measure of the particle removal capacity of a single drop, and presented the predicted ECD data as a function of droplet's velocity and diameter particularly when the droplets are microns in diameter.

Keywords

Acknowledgement

이 연구는 이 과제는 부산대학교 기본연구지원사업(2년)에 의하여 연구되었음.

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