• 한국입자에어로졸학회지
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• 제18권4호
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• pp.129-136
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• 2022

The line width of circuits in semiconductor devices continues to decrease down to a few nanometers. Since nanoparticles attached to the patterned wafer surface may cause malfunction of the devices, it is crucial to remove the contaminant nanoparticles. Physical cleaning that utilizes momentum of liquid for detaching solid nanoparticles has recently been tested in place of the conventional chemical method. Dropwise impaction has been employed to increase the removal efficiency with expectation of more efficient momentum exchange. To date, most of relevant studies have been focused on drop spreading behavior on a horizontal surface in terms of maximum spreading diameters and average spreading velocity of drop. More important is the local liquid velocity at the position of nanoparticle, very near the surface, rather than the vertical average value. In addition, there are very scarce existing studies dealing with microdroplet impaction that may be desirable for minimizing pattern demage of the wafer. In this study, we investigated the local velocity distribution in spreading liquid film under various impaction conditions through the CFD simulation. Combining the numerical results with the particle removal model, we estimated an effective cleaning diameter (ECD), which is a measure of the particle removal capacity of a single drop, and presented the predicted ECD data as a function of droplet's velocity and diameter particularly when the droplets are microns in diameter.

• 로봇학회논문지
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• 제12권1호
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• pp.65-77
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• 2017

In this paper, we introduce the pipe cleaning robot developed to clean the gas impurities of the iron manufacturing equipments. The pipe cleaning robot is composed of two driving modules and one cleaning module. 2-DOF joint units were developed for connections among the modules. To maximize the traction power of the driving parts, it became caterpillar type. The extension links have been developed to maintain the traction force in case the pipe inner diameters change. Three cleaning modules were developed for the effective cleaning in the pipe. The driving and cleaning performance tests of the pipe cleaning robot were proceeded in the field of the iron manufacturing equipments.

• Advances in materials Research
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• 제11권3호
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• pp.211-224
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• 2022

The shrinkage and the mechanical properties of polypropylene hybrid fiber reinforced mortar PHFRM were investigated in this study. Mortars were prepared with limestone crushing sand, Portland cement and polypropylene hybrid fibers PHF. Two types of virgin fibers, having the same length (30 mm) were used for reinforcing test mortars, fibers in diameter of 0.45 mm, used by PLAST BROS factory of Bordj Bou Arreridj (Algeria) for the fabrication of brooms (for household cleaning) and fibers in diameter of 0.25 mm, available on the market, having multiple applications. In this investigation, it was aimed to study the total and autogenous shrinkage, the flexural and compressive strength of mortars based on hybrid fibers. As a result, PHF have negatively affected the mortar workability. However, shrinkage risk was reduced and coarser fibers (PF45) were most effective for reducing shrinkage risk. The mechanical performances and the ductility of PHFRM were also enhanced.

• 마이크로전자및패키징학회지
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• 제11권1호
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• pp.77-85
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• 2004

플라즈마 리플로우 솔더링에서 솔더볼의 접합성을 향상시키기 위해 UBM(Under Bump Metallization)을 Ar-10vol%$H_2$플라즈마로 클리닝하는 방법을 연구하였다. UBM층은 Si 웨이퍼 위에 Au(두께; 20 nm)/ Cu(4 $\mu\textrm{m}$)/ Ni(4 $\mu\textrm{m}$)/ Al(0.4 $\mu\textrm{m}$)을 웨이퍼 측으로 차례대로 증착하였다. 무연 솔더로는Sn-3.5wt%Ag, Sn-3.5wt%Ag-0.7wt%Cu를 사용하였고 Sn-37wt%Pb를 비교 솔더로 사용하였다. 지름이500 $\mu\textrm{m}$인 솔더 볼을 플라즈마 클리닝 처리를 한 UBM과 처리하지 않은 UBM위에 놓고, Ar-10%$H_2$플라즈마 분위기에서 플럭스 리스 솔더링하였다. 이 결과는 플럭스를 사용하여 대기 중에서 열풍 리플로우한 결과와 비교하였다. 실험 결과, 플라즈마 클리닝 후 플라즈마 리플로우한 솔더의 퍼짐율이 클리닝 하지 않은 플라즈마 솔더링보다 20-40%정도 더 높았다. 플라즈마 클리닝 후 플라즈마 리플로우한 솔더 볼의 전단 강도는 약58-65MPa로, 플라즈마 클리닝 하지 않은 플라즈마 리플로우보다 60-80%정도 높았으며, 플럭스를 사용한 열풍 리플로우보다는 15-35%정도 높았다. 따라서 Ar-10%$H_2$가스를 사용하여 UBM에 플라즈마 클리닝하는 공정은 플라즈마 리플로우 솔더 볼의 접합강도를 향상시키는데 상당한 효과가 있는 것으로 확인되었다.

• Fisheries and Aquatic Sciences
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• 제4권1호
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• pp.1-9
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• 2001

This paper describes a procedure extracting feature vector of a target cell more precisely in the case of identifying specified cell. The classification of object type is based on feature vector such as area, complexity, centroid, rotation angle, effective diameter, perimeter, width and height of the object So, the feature vector plays very important role in classifying objects. Because the feature vectors is affected by noises and holes, it is necessary to remove noises contaminated in original image to get feature vector extraction exactly. In this paper, we propose the following method to do to get feature vector extraction exactly. First, by Otsu's optimal threshold selection method and morphological filters such as cleaning, filling and opening filters, we separate objects from background an get rid of isolated particles. After the labeling step by 4-adjacent neighborhood, the labeled image is filtered by the area filter. From this area-filtered image, feature vector such as area, complexity, centroid, rotation angle, effective diameter, the perimeter based on chain code and the width and height based on rotation matrix are extracted. To prove the effectiveness, the proposed method is applied for yeast Zygosaccharomyces rouxn. It is also shown that the experimental results from the proposed method is more efficient in measuring feature vectors than from only Otsu's optimal threshold detection method.

• ETRI Journal
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• 제35권6호
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• pp.1152-1155
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• 2013

A cost-effective and simple solder on pad (SoP) process is proposed for a fine-pitch microbump interconnection. A novel solder bump maker (SBM) material is applied to form a 60-${\mu}m$ pitch SoP. SBM, which is composed of ternary Sn3.0Ag0.5Cu (SAC305) solder powder and a polymer resin, is a paste material used to perform a fine-pitch SoP through a screen printing method. By optimizing the volumetric ratio of the resin, deoxidizing agent, and SAC305 solder powder, the oxide layers on the solder powder and Cu pads are successfully removed during the bumping process without additional treatment or equipment. Test vehicles with a daisy chain pattern are fabricated to develop the fine-pitch SoP process and evaluate the fine-pitch interconnection. The fabricated Si chip has 6,724 bumps with a 45-${\mu}m$ diameter and 60-${\mu}m$ pitch. The chip is flip chip bonded with a Si substrate using an underfill material with fluxing features. Using the fluxing underfill material is advantageous since it eliminates the flux cleaning process and capillary flow process of the underfill. The optimized bonding process is validated through an electrical characterization of the daisy chain pattern. This work is the first report on a successful operation of a fine-pitch SoP and microbump interconnection using a screen printing process.

• 한국안광학회지
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• 제15권3호
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• pp.227-234
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• 2010

목적: 안경용 초음파세척기를 이용하여 소프트콘택트렌즈의 단백질 침전물 세척 효과와 콘택트렌즈의 변수에 미치는 영향을 조사하였다. 방법: 단백질을 오염시킨 etafilcon A 재질의 소프트콘택트렌즈를 다목적용액에 넣어 안경용 초음파세척기와 콘택트렌즈용 초음파세척기를 사용하여 세척하고 대조군의 콘택트렌즈는 다목적용액으로 세척한 후 콘택트렌즈에 남아있는 단백질을 추출하여 정량하였고 콘택트렌즈의 전체지름, 베이스커브, 중심두께, 도수 및 함수율의 변화를 측정하였으며 주사전자현미경(scanning electron microscope)으로 콘택트렌즈 표면을 관찰하였다. 결과: 단백질을 오염시킨 etafilcon A 재질의 콘택트렌즈는 다목적용액에 의해 6.08%의 세척효과를 보였고, 다목적용액에 콘택트렌즈를 넣고 초음파세척기로 세척한 경우에는 시간에 따라 안경용 초음파세척기에서는 23.73~33.92%, 콘택트렌즈용 초음파세척기에서는 0~12.99%의 세척효과를 보였다. 결론: 안경용 초음파세척기로 세척한 콘택트렌즈에서 변수 및 표면 변화는 관찰되지 않았다. 결론: 안경원에서 사용하는 안경용 초음파세척기는 소프트콘택트렌즈의 단백질 침전물 제거에 효과적이고 변수 변화를 유발하지 않아 안경원에서 진단용 소프트렌즈의 세척에 활용될 수 있을 것으로 사료된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.