초록
Cartesian robot is used in semiconductor manufacturing. Friction between steel band and mover wears the steel band. The emission of wear particle from steel band contaminates semiconductor equipment. At the manufacturing site, the steel band is replaced periodically to minimize the generation of wear particle. But this is not a good way to minimize the generation of wear particle, because it is hard to specify the moment of replacement. We suggested the methodology to minimize the generation of wear particle using TRIZ technique. Also we made prototype robot which the solution is applied, and the performance of the solution was verified through experiments. As a result of verification, it was confirmed that the solution significantly reduced the generation of wear particle compared to the standard way.