반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

이중 파장 보정방법 기반 다이나믹 분광타원편광계의 안정도 최적화

Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration

  • Choi, Inho (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Kheiryzadehkhanghah, Saeid (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Choi, Sukhyun (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Hwang, Gukhyeon (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Shim, Junbo (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Kim, Daesuk (Department of Mechanical System Engineering, Jeonbuk National University)
  • 투고 : 2021.09.13
  • 심사 : 2021.09.16
  • 발행 : 2021.09.30
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초록

This paper describes a dynamic spectroscopic ellipsometry based on dual-wavelength calibration. DSE provides ellipsometric parameters at rates above 20 Hz, but the interferometer's sensitivity to temperature makes it difficult for that proposed system to maintain stable 𝜟k over long periods of time. To solve this problem, we set up an additional path in the DSE to perform simulations of the polarization phase calibration method using dual wavelengths. Through simulation, we were able to eliminate most of the polarization phase error and maintain a stable 𝜟k in the long-term stability experiment for 10 hours. This is the result that the 𝜟k stability of the proposed system is improved tens of times compared to the existing system.

키워드

과제정보

This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (2019R1A2C1010009)

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