• 제목/요약/키워드: One-piece Interferometer

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Position Estimation of Sound Source Using Three Optical Mach-Zehnder Acoustic Sensor Array

  • Hwang, Jeong-hwan;Seon, Seokpyeong;Park, Chang-Soo
    • Current Optics and Photonics
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    • 제1권6호
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    • pp.573-578
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    • 2017
  • Position estimation of a sound source based on time difference of arrival at an array of three acousto-optic sensors is introduced. Each sensor consists of a Mach-Zehnder interferometer including a sensing part in one arm that is a piece of fiber surrounded by membrane in order to enhance the acousto-optic effect. Estimation error of a recorded gunshot sound signal was evaluated with the theoretically calculated values for two different locations.

이중 파장 보정방법 기반 다이나믹 분광타원편광계의 안정도 최적화 (Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration)

  • 최인호;헤리저데헌거흐 사이드;최석현;황국현;심준보;김대석
    • 반도체디스플레이기술학회지
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    • 제20권3호
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    • pp.178-183
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    • 2021
  • This paper describes a dynamic spectroscopic ellipsometry based on dual-wavelength calibration. DSE provides ellipsometric parameters at rates above 20 Hz, but the interferometer's sensitivity to temperature makes it difficult for that proposed system to maintain stable 𝜟k over long periods of time. To solve this problem, we set up an additional path in the DSE to perform simulations of the polarization phase calibration method using dual wavelengths. Through simulation, we were able to eliminate most of the polarization phase error and maintain a stable 𝜟k in the long-term stability experiment for 10 hours. This is the result that the 𝜟k stability of the proposed system is improved tens of times compared to the existing system.