한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제20권10호
  • /
  • Pages.112-118
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  • 2021
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  • 1598-6721(pISSN)
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  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
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컬러영상을 이용한 실시간 COF 필름 복합 검사시스템 개발

Development of Real-Time COF Film Complex Inspection System using Color Image

  • 투고 : 2021.07.01
  • 심사 : 2021.09.06
  • 발행 : 2021.10.30
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초록

In this study, an inspection method using a color image is proposed to conduct a real-time inspection of covalent organic framework (COF) films to detect defects, if any. The COF film consists of an upper pattern SR and a lower PI. The proposed system detects the defects of more than 20 ㎛ on the SR surface owing to the characteristics of the pattern, whereas on the PI surface, it detects defects of more than 4 ㎛ by utilizing a micro-optical system. In the existing system, it is difficult for the operator to conduct a full inspection through a high-performance microscope. The proposed inspection algorithm performs the inspection by separating each color component using the color contrast of the pattern on the SR side, and on the PI surface it inspects the bonding state of the mounted chip. As a result, it is possible to confirm the exact location of the defects through the SR and PI surface inspections in the implemented inspection.

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참고문헌

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