Nuclear Engineering and Technology

Korean Nuclear Society (한국원자력학회)
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Calibration-free real-time organic film thickness monitoring technique by reflected X-Ray fluorescence and compton scattering measurement

  • Park, Junghwan (Nuclear Chemistry Research Team, Korea Atomic Energy Research Institute) ;
  • Choi, Yong Suk (Nuclear Chemistry Research Team, Korea Atomic Energy Research Institute) ;
  • Kim, Junhyuck (Nuclear Chemistry Research Team, Korea Atomic Energy Research Institute) ;
  • Lee, Jeongmook (Nuclear Chemistry Research Team, Korea Atomic Energy Research Institute) ;
  • Kim, Tae Jun (Nuclear Chemistry Research Team, Korea Atomic Energy Research Institute) ;
  • Youn, Young-Sang (Department of Chemistry, Yeungnam University) ;
  • Lim, Sang Ho (Nuclear Chemistry Research Team, Korea Atomic Energy Research Institute) ;
  • Kim, Jong-Yun (Nuclear Chemistry Research Team, Korea Atomic Energy Research Institute)
  • Received : 2020.07.10
  • Accepted : 2020.09.14
  • Published : 2021.04.25
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Abstract

Most thickness measurement techniques using X-ray radiation are unsuitable in field processes involving fast-moving organic films. Herein, we propose a Compton scattering X-ray radiation method, which probes the light elements in organic materials, and a new simple, non-destructive, and non-contact calibration-free real-time film thickness measurement technique by setting up a bench-top X-ray thickness measurement system simulating a field process dealing with thin flexible organic films. The use of X-ray fluorescence and Compton scattering X-ray radiation reflectance signals from films in close contact with a roller produced accurate thickness measurements. In a high-thickness range, the contribution of X-ray fluorescence is negligible, whereas that of Compton scattering is negligible in a low-thickness range. X-ray fluorescence and Compton scattering show good correlations with the organic film thickness (R2 = 0.997 and 0.999 for X-ray fluorescence and Compton scattering, respectively, in the thickness range 0-0.5 mm). Although the sensitivity of X-ray fluorescence is approximately 4.6 times higher than that of Compton scattering, Compton scattering signals are useful for thick films (e.g., thicker than ca. 1-5 mm under our present experiment conditions). Thus, successful calibration-free thickness monitoring is possible for fast-moving films, as demonstrated in our experiments.

Keywords

Acknowledgement

This research was supported by the National Research Foundation of Korea funded by the Korean government (Ministry of Science and ICT) (grant nos. 2017M2A8A5014754 and 2019M1A7A1A02085179).

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