반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

PECVD 공정을 이용한 후면 패시베이션 및 결정질 실리콘 태양전지 적용에 관한 연구

A Study on the Application of Thin Film Passivation and Crystalline Silicon Solar Cells Using PECVD Process

  • 김관도 (평택대학교 융합소프트웨어학과)
  • Kim, Kwan-Do (Dept. of Convergence Software, PyeongTaek University)
  • 투고 : 2020.06.11
  • 심사 : 2020.06.22
  • 발행 : 2020.06.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this study, SiNx and Al2O3 thin film was manufactured using PECVD deposition process and applied to crystalline silicon solar cells, resulting in 16.7% conversion efficiency. The structural improvement experiment of the rear electrode resulted in a 1.7% improvement in conversion efficiency compared to the reference cell by reducing the recombination rate of minority carriers and increasing the carrier lifetime by forming a passivation layer consisting of SiNx and Al2O3 thin films through the PECVD process.

키워드

참고문헌

  1. Jiun-Hong Lai et al, "High-Efficiency Large-Area Rear Passivated Silicon Solar Cells With Local Al-BSF and Screen-Printed Contacts", IEEE Journal of Photovoltaics, Vol. 1, No. 1, pp. 16-21, 2011. https://doi.org/10.1109/JPHOTOV.2011.2163151
  2. K. Kotsovos, K. Misiakos, "Base limited carrier transport and performance of double junction rear point contact silicon solar cells", Solar Energy Materials & Solar Cells, 77, pp. 209-227, 2003. https://doi.org/10.1016/S0927-0248(02)00342-2
  3. Emmanuel Van Kerschaver and Guy Beaucarne, "Backcontact Solar Cells: A Review", Progress in Photovoltaics: Research and Applications, Vol. 14, pp. 107-123, 2006. https://doi.org/10.1002/pip.657
  4. R. Woehl, J. Krause, F. Granek, D. Biro, "Highly efficient all-screen-printed back-contact back-junction silicon solar cells with aluminum-alloyed emitter", Energy Procedia, Vol. 8, pp. 17-22, 2011. https://doi.org/10.1016/j.egypro.2011.06.095
  5. S. M. Yang, J. Pla, "Optimization of the back contact in c-Si solar cells", Solid-State Electronics, Vol. 53, pp. 925-930, 2009. https://doi.org/10.1016/j.sse.2009.04.030
  6. Daniel Kray, Martin Hermle and Stefan W. Glunz, "Theory and Experiments on the Back Side Reflectance of Silicon Wafer Solar Cells", Progress in Photovoltaics: Research and Applications, Vol. 16, pp. 1-15, 2008. https://doi.org/10.1002/pip.769
  7. Dae-Yong Lee et al, "A new back surface passivation stack for thin crystalline silicon solar cells with screenprinted back contacts", Solar Energy Materials & Solar Cells, Vol. 95, pp. 26-29, 2011. https://doi.org/10.1016/j.solmat.2010.05.004
  8. K. A. Munzera et al, "Physical properties of industrial 19 % rear side passivated Al-LBSFR-solar cells", Energy Procedia, Vol. 8, pp. 415-420, 2011. https://doi.org/10.1016/j.egypro.2011.06.159
  9. K. A. Munzer et al, "Rear Side Passivated and Locally Contacted Solar Cells with Laser Diffused Selective Emitter", Energy Procedia, Vol. 15, pp. 1-9, 2012. https://doi.org/10.1016/j.egypro.2012.02.001
  10. Eunjoo Lee et al, "Exceeding 19 % efficient 6 inch screen printed crystalline silicon solar cells with selective emitter", Renewable Energy, Vol. 42, pp. 95-98, 2012. https://doi.org/10.1016/j.renene.2011.09.010
  11. Hoong Joo Lee, "TCAD Simulation of Silicon Pillar Array Solar Cells", Journal of the Semiconductor & Display Technology, Vol. 16, No. 1, pp. 65-69, 2017.
  12. Myung-il Jeong and Cheol-Jong Choi, "Passivation property of $Al_2O_3$ thin film for the application of n-type crystalline Si solar cells", Journal of the Korean Crystal Growth and Crystal Technology, Vol. 24, No. 3, pp. 106-110, 2014. https://doi.org/10.6111/JKCGCT.2014.24.3.106