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A Study on the Application of Thin Film Passivation and Crystalline Silicon Solar Cells Using PECVD Process  

Kim, Kwan-Do (Dept. of Convergence Software, PyeongTaek University)
Publication Information
Journal of the Semiconductor & Display Technology / v.19, no.2, 2020 , pp. 68-71 More about this Journal
Abstract
In this study, SiNx and Al2O3 thin film was manufactured using PECVD deposition process and applied to crystalline silicon solar cells, resulting in 16.7% conversion efficiency. The structural improvement experiment of the rear electrode resulted in a 1.7% improvement in conversion efficiency compared to the reference cell by reducing the recombination rate of minority carriers and increasing the carrier lifetime by forming a passivation layer consisting of SiNx and Al2O3 thin films through the PECVD process.
Keywords
Silicon Solar Cell; PECVD; Thin Film Passivation; Conversion Efficiency;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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