Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effects of Cu Addition on Microstructural and Mechanical Properties of Mo-Cu-N Coatings

Cu 첨가가 Mo-Cu-N 코팅의 미세구조와 기계적 특성에 미치는 영향

  • Kim, Soobyn (Department of Interdisciplinary Eco Science, Sungshin University) ;
  • Yoon, Hae-Won (Heat Treatment R&D Group, Korea Institute of Industrial Technology) ;
  • Lee, Han-Chan (Heat Treatment R&D Group, Korea Institute of Industrial Technology) ;
  • Moon, KyoungIl (Heat Treatment R&D Group, Korea Institute of Industrial Technology) ;
  • Hong, Hyun Seon (Department of Interdisciplinary Eco Science, Sungshin University)
  • 김수빈 (성신여자대학교 청정융합과학과) ;
  • 윤혜원 (한국생산기술연구원 열처리그룹) ;
  • 이한찬 (한국생산기술연구원 열처리그룹) ;
  • 문경일 (한국생산기술연구원 열처리그룹) ;
  • 홍현선 (성신여자대학교 청정융합과학과)
  • Received : 2019.08.16
  • Accepted : 2019.08.30
  • Published : 2019.08.30
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Abstract

Mo-N based coatings have been studied for enhancing mechanical characteristics of thin films. In the case of Mo-X-N coatings, the microstructure and mechanical properties can be affected by the addition of the third element. In this work, Mo-Cu-N coatings were successfully fabricated with varying the Cu content from 4.5 at% to 31 at% by the co-sputtering method. Thus, properties of the coatings were analyzed by EDS, SEM, XRD, AFM, nano indentation and scratch test techniques. From observed results, MoxN bonds were made in a nitrogen atmosphere and Cu elements were present at grain boundaries. In addition, coatings with the Cu content above 14 at% had a Cu3N peak in the XRD results. Thus, it is suggested that the formation of Cu3N phase affected the microstructure and mechanical properties of Mo-Cu-N coatings. Mechanical properties of Mo-Cu-N coatings were found to be relatively better at Cu content of about 12 at%.

Keywords

References

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