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http://dx.doi.org/10.5695/JKISE.2019.52.4.227

Effects of Cu Addition on Microstructural and Mechanical Properties of Mo-Cu-N Coatings  

Kim, Soobyn (Department of Interdisciplinary Eco Science, Sungshin University)
Yoon, Hae-Won (Heat Treatment R&D Group, Korea Institute of Industrial Technology)
Lee, Han-Chan (Heat Treatment R&D Group, Korea Institute of Industrial Technology)
Moon, KyoungIl (Heat Treatment R&D Group, Korea Institute of Industrial Technology)
Hong, Hyun Seon (Department of Interdisciplinary Eco Science, Sungshin University)
Publication Information
Journal of the Korean institute of surface engineering / v.52, no.4, 2019 , pp. 227-232 More about this Journal
Abstract
Mo-N based coatings have been studied for enhancing mechanical characteristics of thin films. In the case of Mo-X-N coatings, the microstructure and mechanical properties can be affected by the addition of the third element. In this work, Mo-Cu-N coatings were successfully fabricated with varying the Cu content from 4.5 at% to 31 at% by the co-sputtering method. Thus, properties of the coatings were analyzed by EDS, SEM, XRD, AFM, nano indentation and scratch test techniques. From observed results, MoxN bonds were made in a nitrogen atmosphere and Cu elements were present at grain boundaries. In addition, coatings with the Cu content above 14 at% had a Cu3N peak in the XRD results. Thus, it is suggested that the formation of Cu3N phase affected the microstructure and mechanical properties of Mo-Cu-N coatings. Mechanical properties of Mo-Cu-N coatings were found to be relatively better at Cu content of about 12 at%.
Keywords
Mo-Cu-N; Cu content; Sputtering; Nanocomposite coating; Thin film;
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