참고문헌
-
L. Tao, K. Chen, Z. Chen, W. Chen, X. Gui, H. Chen, X. Li, and J.-B. Xu, "Centimeter-Scale CVD Growth of Highly Crystalline Single-Layer
$MoS_2$ Film with Spatial Homogeneity and the Visualization of Grain Boundaries," ACS Appl. Mater. Interfaces, 9 [13] 12073-81 (2017). https://doi.org/10.1021/acsami.7b00420 -
S. Wu, C. Huang, G. Aivazian, J. S. Ross, D. H. Cobden, and X. Xu, "Vapor-Solid Growth of High Optical Quality
$MoS_2$ Monolayers with Near-Unity Valley Polarization," ACS Nano, 7 [3] 2768-72 (2013). https://doi.org/10.1021/nn4002038 - A. M. Van Der Zande, P. Y. Huang, D. A. Chenet, T. C. Berkelbach, Y. You, G.-H. Lee, T. F. Heinz, D. R. Reichman, D. A. Muller, and J. C. Hone, "Grains and Grain Boundaries in Highly Crystalline Monolayer Molybdenum Disulphide," Nat. Mater., 12 554-61 (2013). https://doi.org/10.1038/nmat3633
-
Z. Lin, Y. Zhao, C. Zhou, R. Zhong, X. Wang, Y. H. Tsang, and Y. Chai, "Controllable Growth of Large-Size Crystalline
$MoS_2$ and Resist-Free Transfer Assisted with a Cu Thin Film," Sci. Rep., 5 18596 (2015). https://doi.org/10.1038/srep18596 -
J. Zhang, H. Yu, W. Chen, X. Tian, D. Liu, M. Cheng, G. Xie, W. Yang, R. Yang, and X. Bai, "Scalable Growth of High-Quality Polycrystalline
$MoS_2$ Monolayers on$SiO_2$ with Tunable Grain Sizes," ACS Nano, 8 [6] 6024-30 (2014). https://doi.org/10.1021/nn5020819 - Y. Lee, J. Lee, H. Bark, I.-K. Oh, G. H. Ryu, Z. Lee, H. Kim, J. H. Cho, J.-H. Ahn, and C. Lee, "Synthesis of Wafer-Scale Uniform Molybdenum Disulfide Films with Control over the Layer Number Using a Gas Phase Sulfur Precursor," Nanoscale, 6 [5] 2821-26 (2014). https://doi.org/10.1039/c3nr05993f
-
Y.-C. Lin, W. Zhang, J.-K. Huang, K.-K. Liu, Y.-H. Lee, C.-T. Liang, C.-W. Chu, and L.-J. Li, "Wafer-Scale
$MoS_2$ Thin Layers Prepared by$MoO_3$ Sulfurization," Nanoscale, 4 [20] 6637-41 (2012). https://doi.org/10.1039/c2nr31833d - K. Kang, S. Xie, L. Huang, Y. Han, P. Y. Huang, K. F. Mak, C.-J. Kim, D. Muller, and J. Park, "High-Mobility Three-Atom-Thick Semiconducting Films with Wafer-Scale Homogeneity," Nature, 520 656-60 (2015). https://doi.org/10.1038/nature14417
- J. D. Cain, F. Shi, J. Wu, and V. P. Dravid, "Growth Mechanism of Transition Metal Dichalcogenide Monolayers: the Role of Self-Seeding Fullerene Nuclei," ACS Nano, 10 [5] 5440-45 (2016).
-
D. Zhu, H. Shu, F. Jiang, D. Lv, V. Asokan, O. Omar, J. Yuan, Z. Zhang, and C. Jin, "Capture the Growth Kinetics of CVD Growth of Two-Dimensional
$MoS_2$ ," npj 2D Mater. Appl., 1 [1] 1-8 (2017). - G. H. Han, N. J. Kybert, C. H. Naylor, B. S. Lee, J. Ping, J. H. Park, J. Kang, S. Y. Lee, Y. H. Lee, and R. Agarwal, "Seeded Growth of Highly Crystalline Molybdenum Disulphide Monolayers at Controlled Locations," Nat. Commun., 6 [1] 6128 (2015). https://doi.org/10.1038/ncomms7128
-
Y. H. Lee, X. Q. Zhang, W. Zhang, M. T. Chang, C. T. Lin, K. D. Chang, Y. C. Yu, J. T. W. Wang, C. S. Chang, and L. J. Li, "Synthesis of Large-Area
$MoS_2$ Atomic Layers with Chemical Vapor Deposition," Adv. Mater., 24 [17] 2320-25 (2012). https://doi.org/10.1002/adma.201104798 - Z. Wang, Q. Huang, P. Chen, S. Guo, X. Liu, X. Liang, and L. Wang, "Metal Induced Growth of Transition Metal Dichalcogenides at Controlled Locations," Sci. Rep., 6 38394 (2016). https://doi.org/10.1038/srep38394
-
X. Ling, Y.-H. Lee, Y. Lin, W. Fang, L. Yu, M. S. Dresselhaus, and J. Kong, "Role of the Seeding Promoter in
$MoS_2$ Growth by Chemical Vapor Deposition," Nano Lett., 14 [2] 464-72 (2014). https://doi.org/10.1021/nl4033704 -
Y. Li, S. Hao, J. G. DiStefano, A. A. Murthy, E. D. Hanson, Y. Xu, C. Wolverton, X. Chen, and V. P. Dravid, "Site-Specific Positioning and Patterning of
$MoS_2$ Monolayers: The Role of Au Seeding," ACS Nano, 12 [9] 8970-76 (2018). https://doi.org/10.1021/acsnano.8b02409 -
S.-L. Shang, G. Lindwall, Y. Wang, J. M. Redwing, T. Anderson, and Z.-K. Liu, "Lateral Versus Vertical Growth of Two-Dimensional Layered Transition-Metal Dichalcogenides: Thermodynamic Insight into
$MoS_2$ ," Nano Lett., 16 [9] 5742-50 (2016). https://doi.org/10.1021/acs.nanolett.6b02443 -
S. Wang, Y. Rong, Y. Fan, M. Pacios, H. Bhaskaran, K. He, and J. H. Warner, "Shape Evolution of Monolayer
$MoS_2$ Crystals Grown by Chemical Vapor Deposition," Chem. Mater., 26 [22] 6371-79 (2014). https://doi.org/10.1021/cm5025662 - A. Govind Rajan, J. H. Warner, D. Blankschtein, and M. S. Strano, "Generalized Mechanistic Model for the Chemical Vapor Deposition of 2D Transition Metal Dichalcogenide Monolayers," ACS Nano, 10 [4] 4330-44 (2016). https://doi.org/10.1021/acsnano.5b07916
-
D. Cao, T. Shen, P. Liang, X. Chen, and H. Shu, "Role of Chemical Potential in Flake Shape and Edge Properties of Monolayer
$MoS_2$ ," J. Phys. Chem. C, 119 [8] 4294-301 (2015). https://doi.org/10.1021/jp5097713 -
M. Saab and P. Raybaud, "Tuning the Magnetic Properties of
$MoS_2$ Single Nanolayers by 3d Metals Edge Doping," J. Phys. Chem. C, 120 [19] 10691-97 (2016). https://doi.org/10.1021/acs.jpcc.6b02865 - H. Ye, J. Zhou, D. Er, C. C. Price, Z. Yu, Y. Liu, J. Lowengrub, J. Lou, Z. Liu, and V. B. Shenoy, "Toward a Mechanistic Understanding of Vertical Growth of van der Waals Stacked 2D Materials: A Multiscale Model and Experiments," ACS Nano, 11 [12] 12780-88 (2017). https://doi.org/10.1021/acsnano.7b07604
- A. Aljarb, Z. Cao, H.-L. Tang, J.-K. Huang, M. Li, W. Hu, L. Cavallo, and L.-J. Li, "Substrate Lattice-Guided Seed Formation Controls the Orientation of 2D Transition-Metal Dichalcogenides," ACS Nano, 11 [9] 9215-22 (2017). https://doi.org/10.1021/acsnano.7b04323
-
H. Yu, M. Liao, W. Zhao, G. Liu, X. Zhou, Z. Wei, X. Xu, K. Liu, Z. Hu, and K. Deng, "Wafer-Scale Growth and Transfer of Highly-Oriented Monolayer
$MoS_2$ Continuous Films," ACS Nano, 11 [12] 12001-7 (2017). https://doi.org/10.1021/acsnano.7b03819 -
Q. Ji, Y. Zhang, T. Gao, Y. Zhang, D. Ma, M. Liu, Y. Chen, X. Qiao, P.-H. Tan, and M. Kan, "Epitaxial Monolayer
$MoS_2$ on Mica with Novel Photoluminescence," Nano Lett., 13 [8] 3870-77 (2013). https://doi.org/10.1021/nl401938t - D. Ruzmetov, K. Zhang, G. Stan, B. Kalanyan, G. R. Bhimanapati, S. M. Eichfeld, R. A. Burke, P. B. Shah, T. P. O'Regan, and F. J. Crowne, "Vertical 2D/3D Semiconductor Heterostructures based on Epitaxial Molybdenum Disulfide and Gallium Nitride," ACS Nano, 10 [3] 3580-88 (2016). https://doi.org/10.1021/acsnano.5b08008
- M. Okada, T. Sawazaki, K. Watanabe, T. Taniguch, H. Hibino, H. Shinohara, and R. Kitaura, "Direct Chemical Vapor Deposition Growth of WS2 Atomic Layers on Hexagonal Boron Nitride," ACS Nano, 8 [8] 8273-77 (2014). https://doi.org/10.1021/nn503093k
-
Y. Zhang, Q. Ji, J. Wen, J. Li, C. Li, J. Shi, X. Zhou, K. Shi, H. Chen, and Y. Li, "Monolayer
$MoS_2$ Dendrites on a Symmetry-Disparate$SrTiO_3$ (001) Substrate: Formation Mechanism and Interface Interaction," Adv. Funct. Mater., 26 [19] 3299-305 (2016). https://doi.org/10.1002/adfm.201505571 - J. Chen, X. Zhao, G. Grinblat, Z. Chen, S. J. Tan, W. Fu, Z. Ding, I. Abdelwahab, Y. Li, and D. Geng, "Homoepitaxial Growth of Large-Scale Highly Organized Transition Metal Dichalcogenide Patterns," Adv. Mater., 30 [4] 1704674 (2018). https://doi.org/10.1002/adma.201704674
-
X. Zhang, T. H. Choudhury, M. Chubarov, Y. Xiang, B. Jariwala, F. Zhang, N. Alem, G.-C. Wang, J. A. Robinson, and J. M. Redwing, "Diffusion-Controlled Epitaxy of Large Area Coalesced
$WSe_2$ Monolayers on Sapphire," Nano Lett., 18 [2] 1049-56 (2018). https://doi.org/10.1021/acs.nanolett.7b04521 - S. H. Choi, B. Stephen, J. H. Park, J. S. Lee, S. M. Kim, W. Yang, and K. K. Kim, "Water-Assisted Synthesis of Molybdenum Disulfide Film with Single Organic Liquid Precursor," Sci. Rep., 7 [1] 1983 (2017). https://doi.org/10.1038/s41598-017-02228-8
- T. Millner and J. Neugebauer, "Volatility of the Oxides of Tungsten and Molybdenum in the Presence of Water Vapour," Nature, 163 601-2 (1949).
- G. Belton and A. Jordan, "The Volatilization of Molybdenum in the Presence of Water Vapor," J. Phys. Chem., 69 [6] 2065-71 (1965). https://doi.org/10.1021/j100890a043
- G. Belton and R. McCarron, "The Volatilization of Tungsten in the Presence of Water Vapor," J. Phys. Chem., 68 [7] 1852-56 (1964). https://doi.org/10.1021/j100789a030
-
W. Chen, J. Zhao, J. Zhang, L. Gu, Z. Yang, X. Li, H. Yu, X. Zhu, R. Yang, and D. Shi, "Oxygen-Assisted Chemical Vapor Deposition Growth of Large Single-Crystal and High-Quality Monolayer
$MoS_2$ ," J. Am. Chem. Soc., 137 [50] 15632-35 (2015). https://doi.org/10.1021/jacs.5b10519 - J. Zhou, J. Lin, X. Huang, Y. Zhou, Y. Chen, J. Xia, H. Wang, Y. Xie, H. Yu, and J. Lei, "A Library of Atomically Thin Metal Chalcogenides," Nature, 556 355-59 (2018). https://doi.org/10.1038/s41586-018-0008-3
-
S. Li, Y.-C. Lin, W. Zhao, J. Wu, Z. Wang, Z. Hu, Y. Shen, D.-M. Tang, J. Wang, and Q. Zhang, "Vapour-Liquid-Solid Growth of Monolayer
$MoS_2$ Nanoribbons," Nat. Mater., 17 535-42 (2018). https://doi.org/10.1038/s41563-018-0055-z -
S. Li, S. Wang, D.-M. Tang, W. Zhao, H. Xu, L. Chu, Y. Bando, D. Golberg, and G. Eda, "Halide-Assisted Atmospheric Pressure Growth of Large
$WSe_2\;and\;WS_2$ Monolayer Crystals," Appl. Mater. Today, 1 [1] 60-6 (2015). https://doi.org/10.1016/j.apmt.2015.09.001 -
Y. Gong, J. Lin, X. Wang, G. Shi, S. Lei, Z. Lin, X. Zou, G. Ye, R. Vajtai, and B. I. Yakobson, "Vertical and In-Plane Heterostructures from
$WS_2/MoS_2$ Monolayers," Nat. Mater., 13 1135-42 (2014). https://doi.org/10.1038/nmat4091 - A.-Y. Lu, H. Zhu, J. Xiao, C.-P. Chuu, Y. Han, M.-H. Chiu, C.-C. Cheng, C.-W. Yang, K.-H. Wei, and Y. Yang, "Janus Monolayers of Transition Metal Dichalcogenides," Nat. Nanotechnol., 12 744-49 (2017). https://doi.org/10.1038/nnano.2017.100
- J. Zhang, S. Jia, I. Kholmanov, L. Dong, D. Er, W. Chen, H. Guo, Z. Jin, V. B. Shenoy, and L. Shi, "Janus Monolayer Transition-Metal Dichalcogenides," ACS Nano, 11 [8] 8192-98 (2017). https://doi.org/10.1021/acsnano.7b03186
-
D. Kong, H. Wang, J. J. Cha, M. Pasta, K. J. Koski, J. Yao, and Y. Cui, "Synthesis of
$MoS_2\;and\;MoSe_2$ Films with Vertically Aligned Layers," Nano Lett., 13 [3] 1341-47 (2013). https://doi.org/10.1021/nl400258t -
L. Zhang, K. Liu, A. B. Wong, J. Kim, X. Hong, C. Liu, T. Cao, S. G. Louie, F. Wang, and P. Yang, "Three-Dimensional Spirals of Atomic Layered
$MoS_2$ ," Nano Lett., 14 [11] 6418-23 (2014). https://doi.org/10.1021/nl502961e -
J. Zhang, M. Ye, S. Bhandari, A. K. M. Muqri, F. Long, S. Bigham, Y. K. Yap, and J. Y. Suh, "Enhanced Second and Third Harmonic Generations of Vertical and Planar Spiral
$MoS_2$ Nanosheets," Nanotechnology, 28 [29] 295301 (2017). https://doi.org/10.1088/1361-6528/aa7825 -
J. Verble, T. Wietling, and P. Reed, "Rigid-Layer Lattice Vibrations and van der Waals Bonding in Hexagonal
$MoS_2$ ," Solid State Commun., 11 [8] 941-44 (1972). https://doi.org/10.1016/0038-1098(72)90294-3 -
D. Kong, W. Dang, J. J. Cha, H. Li, S. Meister, H. Peng, and Z. Liu, and Y. Cui, "Few-Layer Nanoplates of
$Bi_2Se_3$ and$Bi_2Te_3$ with Highly Tunable Chemical Potential," Nano Lett., 10 [6] 2245-50 (2010). https://doi.org/10.1021/nl101260j -
J. Zheng, X. Yan, Z. Lu, H. Qiu, G. Xu, X. Zhou, P. Wang, X. Pan, K. Liu, and L. Jiao, "High-Mobility Multilayered
$MoS_2$ Flakes with Low Contact Resistance Grown by Chemical Vapor Deposition," Adv. Mater., 29 [13] 1604540 (2017). https://doi.org/10.1002/adma.201604540 -
S. M. Shinde, K. P. Dhakal, X. Chen, W. S. Yun, J. Lee, H. Kim, and J.-H. Ahn, "Stacking-Controllable Interlayer Coupling and Symmetric Configuration of Multilayered
$MoS_2$ ," NPG Asia Mater., 10 e468 (2018). https://doi.org/10.1038/am.2017.226 - J. C. Park, S. J. Yun, H. Kim, J.-H. Park, S. H. Chae, S.-J. An, J.-G. Kim, S. M. Kim, K. K. Kim, and Y. H. Lee, "Phase-Engineered Synthesis of Centimeter-Scale 1T′-and 2H-Molybdenum Ditelluride Thin Films," ACS Nano, 9 [6] 6548-54 (2015). https://doi.org/10.1021/acsnano.5b02511
-
S. Cho, S. Kim, J. H. Kim, J. Zhao, J. Seok, D. H. Keum, J. Baik, D.-H. Choe, K. J. Chang, and K. Suenaga, "Phase Patterning for Ohmic Homojunction Contact in
$MoTe_2$ ," Science, 349 [6248] 625-28 (2015). https://doi.org/10.1126/science.aab3175 -
S. Song, D. H. Keum, S. Cho, D. Perello, Y. Kim, and Y. H. Lee, "Room Temperature Semiconductor-Metal Transition of
$MoTe_2$ Thin Films Engineered by Strain," Nano Lett., 16 [1] 188-93 (2015). https://doi.org/10.1021/acs.nanolett.5b03481 - Y. Li, K.-A. N. Duerloo, K. Wauson, and E. J. Reed, "Structural Semiconductor-to-Semimetal Phase Transition in Two-Dimensional Materials Induced by Electrostatic Gating," Nat. Commun., 7 10671 (2016). https://doi.org/10.1038/ncomms10671
-
J. H. Sung, H. Heo, S. Si, Y. H. Kim, H. R. Noh, K. Song, J. Kim, C.-S. Lee, S.-Y. Seo, and D.-H. Kim, "Coplanar Semiconductor-Metal Circuitry Defined on Few-Layer
$MoTe_2$ via Polymorphic Heteroepitaxy," Nat. Nanotechnol., 12 1064-70 (2017). https://doi.org/10.1038/nnano.2017.161 -
T. A. Empante, Y. Zhou, V. Klee, A. E. Nguyen, I.-H. Lu, M. D. Valentin, S. A. Naghibi Alvillar, E. Preciado, A. J. Berges, and C. S. Merida, "Chemical Vapor Deposition Growth of Few-Layer
$MoTe_2$ in the 2H, 1T′, and 1T Phases: Tunable Properties of$MoTe_2$ Films," ACS Nano, 11 [1] 900-5 (2017). https://doi.org/10.1021/acsnano.6b07499
피인용 문헌
- Functional Layered Double Hydroxide Nanohybrids for Biomedical Imaging vol.9, pp.10, 2019, https://doi.org/10.3390/nano9101404
- Biocompatible Hydrotalcite Nanohybrids for Medical Functions vol.10, pp.2, 2019, https://doi.org/10.3390/min10020172
- Study of the Properties of Two-Dimensional MoS2 and WS2 Films Synthesized by Chemical-Vapor Deposition vol.54, pp.4, 2020, https://doi.org/10.1134/s1063782620040193
- MoS 2 ‐Based Nanomaterials for Room‐Temperature Gas Sensors vol.5, pp.5, 2019, https://doi.org/10.1002/admt.201901062
- Phase-field modelling of 2D island growth morphology in chemical vapor deposition vol.43, pp.9, 2020, https://doi.org/10.1140/epje/i2020-11981-8
- Robust Room-Temperature NO2 Sensors from Exfoliated 2D Few-Layered CVD-Grown Bulk Tungsten Di-selenide (2H-WSe2) vol.13, pp.3, 2019, https://doi.org/10.1021/acsami.0c17924
- Efficient ReSe2 Photodetectors with CVD Single-Crystal Graphene Contacts vol.11, pp.7, 2021, https://doi.org/10.3390/nano11071650
- Layered Double Hydroxide Nanomaterials: Biomedical Applications, Current Status and Challenges vol.11, pp.3, 2019, https://doi.org/10.1142/s1793984421300089