Journal of the Korean Physical Society

Korean Physical Society (한국물리학회)
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Deposition of Fine Linewidth Silver Layer using a Modified Laser-induced Forward Transfer Technique

  • Cheon, Jonggyu (Department of Materials Science and Engineering, Inha University) ;
  • Nguyen, Manh-Cuong (Department of Materials Science and Engineering, Inha University) ;
  • Nguyen, An Hoang-Thuy (Department of Materials Science and Engineering, Inha University) ;
  • Choi, Sujin (Department of Materials Science and Engineering, Inha University) ;
  • Ji, Hyung-Min (Department of Materials Science and Engineering, Inha University) ;
  • Kim, Sang-Woo (Department of Materials Science and Engineering, Inha University) ;
  • Yu, Kyoung-Moon (Department of Materials Science and Engineering, Inha University) ;
  • Kim, Jin-Hyun (Department of Materials Science and Engineering, Inha University) ;
  • Cho, Seong-Yong (Department of Materials Science and Engineering, Inha University) ;
  • Choi, Rino (Department of Materials Science and Engineering, Inha University)
  • Received : 2018.02.27
  • Accepted : 2018.05.08
  • Published : 2018.11.15
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Abstract

This paper reports the deposition of a metal line using a multilayer stack and laser-induced forward transfer (LIFT) using a low cost continuous wave blue laser with a wavelength of 450 nm. The donor structure was composed of a light-to-heat (LTH) layer, a release layer, and a transfer layer in series. Amorphous silicon as the LTH layer absorbs photon energy and converts it to heat. A release layer was melted so that a silver transfer layer would be transferred to the receiver substrate. The transferred silver layer showed reasonable physical and electrical characteristics. A low cost fine linewidth metal layer could be achieved using this modified LIFT technique and blue laser.

Keywords

Acknowledgement

Supported by : Inha University

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