Journal of Electrical Engineering and Technology

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지
DOI QR코드

DOI QR Code

Analysis and Design of Resonant Inverter for Reactive Gas Generator Considering Characteristics of Plasma Load

  • Ahn, Hyo Min (Department of Electrical and Computer Engineering, Sungkyunkwan University) ;
  • Sung, Won-Yong (Department of Electrical and Computer Engineering, Sungkyunkwan University) ;
  • Lee, Byoung Kuk (Department of Electrical and Computer Engineering, Sungkyunkwan University)
  • Received : 2017.09.18
  • Accepted : 2017.10.20
  • Published : 2018.01.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper analyzes a resonant inverter to generate plasma. The resonant inverter consists of a full bridge converter, resonant network and reactor to generate a magnetic field for plasma generation. A plasma load has very distinct characteristics compared to conventional loads. The characteristics of plasma load are analyzed through experimental results. This paper presents the study on the resonant network, which was performed in order to determine how to achieve a constant current gain. Another important contribution of this study is the analysis of drop-out phenomenon observed in plasma loads which is responsible for unpredictable shutdown of the plasma generator that requires stable operation. In addition, the design process for the resonant network of a plasma generator is proposed. The validity of this study is verified through simulations and experimental results.

Keywords

E1EEFQ_2018_v13n1_345_f0001.png 이미지

Fig. 1. Basic structure of the reactive gas generator

E1EEFQ_2018_v13n1_345_f0002.png 이미지

Fig. 2. Impedance of plasma load when the operatingfrequency varies

E1EEFQ_2018_v13n1_345_f0003.png 이미지

Fig. 3. Impedance of plasma load when the primary currentof the reactor varies

E1EEFQ_2018_v13n1_345_f0004.png 이미지

Fig. 4. Comparison of current gain between conventionaland plasma loads

E1EEFQ_2018_v13n1_345_f0005.png 이미지

Fig. 5. Circuit diagram of resonant inverter for reactive gas generator

E1EEFQ_2018_v13n1_345_f0006.png 이미지

Fig. 6. Current gain (H) for γ 1=

E1EEFQ_2018_v13n1_345_f0007.png 이미지

Fig. 7. Phase difference between inverter voltage and

E1EEFQ_2018_v13n1_345_f0008.png 이미지

Fig. 8. Proposed control diagram

E1EEFQ_2018_v13n1_345_f0009.png 이미지

Fig. 9. Simulation waveforms (Ro=2Ω, Iplasma*=30A)

E1EEFQ_2018_v13n1_345_f0010.png 이미지

Fig. 10. Simulation waveforms (Ro=6Ω, Iplasma*=30A)

E1EEFQ_2018_v13n1_345_f0011.png 이미지

Fig. 11. Simulation waveforms (Ro=6Ω, Iplasma*= 20A)

E1EEFQ_2018_v13n1_345_f0012.png 이미지

Fig. 12. Experimental waveforms

Table 1. Specification of the reactive gas generator

E1EEFQ_2018_v13n1_345_t0001.png 이미지

References

  1. S. S. Kim, D. K. Choi, "The development of RF generator for remote plasma cleaning source," The 30th International Conference on Plasma Science, 2003. ICOPS 2003.
  2. J. H. Lee, D. K. Choi, S. S. Kim, B. K. Lee, C. Y. Won "RF Power Conversional System for Environmentfriendly Ferrite Core Inductively Coupled Plasma Generator," Journal of the Korean Institute of Illuminating and Electrical Installation Engineers, vol. 20, no. 8, pp. 6-14, Sep. 2006. https://doi.org/10.5207/JIEIE.2006.20.8.006
  3. Ken Tran, Alan Millner, "A new power supply to ignite and sustain plasma in a reactive gas generator," 2008 Twenty-Third Annual IEEE Applied Power Electronics Conference and Exposition, pp. 1885-1892, 2008.
  4. S. Raoux, J. G. Langan, "Remote NF3 Chamber Clean Virtually Eliminates PFC Emission from CVD Chamber and Improves System Productivity," semiconductor fabtech-9th edition, pp. 107-113.
  5. Y. K. Lee, D. S. Lee, K. H. Bai, C. W. Chung, H.Y. Chang, "On inductively coupled plasma for nextgeneration processing," Surface and Coatings Technology, pp. 167-170, 2003.
  6. D. K. Choi, applied for a U.S. patent (Appl. No.10- 2002-63298).
  7. M. Borage, S. Tiwari, S. Kotaiah, "Analysis and design of an LCL-T resonant converter as a constantcurrent power supply," IEEE Transactions on Industrial Electronics, vol. 52, no. 6, pp 1547-1554, 2005. https://doi.org/10.1109/TIE.2005.858729
  8. G. S. N. Raju, S. Doradla, "An LCL resonant converter with PWM control-analysis, simulation, and implementation," IEEE Transactions on Power Electronics, vol. 10, no. 2, pp. 164-174, 1995. https://doi.org/10.1109/63.372601