Effects of Filtering System of Cutting Fluid on the Surface Quality of Plasma Etching Electrode

절삭유의 필터링 시스템이 플라즈마 에칭 전극의 표면 품질에 미치는 영향

  • Lee, Eun Young (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education) ;
  • Kim, Moon Ki (School of Mechatronics Engineering, Korea University of Technology and Education)
  • 이은영 (한국기술교육대학교 메카트로닉스공학과) ;
  • 김문기 (한국기술교육대학교 메카트로닉스공학부)
  • Received : 2018.11.26
  • Accepted : 2018.12.18
  • Published : 2018.12.31

Abstract

The purpose of this study is to analyze effects of filtering system of cutting fluid which is used for machining silicon electrode. For the research, different sizes of filter clothes are applied to check grain size of sludge of cutting fluid. Surface roughness of machined workpiece, depth of damage inside of silicon electrode, and suspended solids of cutting fluid are experimented and analyzed. From these experiments, it is verified that filtering system of cutting fluid is very important factor for machining. Results of this study can affect various benefits to the semiconductor industry for better productivity and better atmospheric pollution in workplace.

Keywords

References

  1. W. K. Choi, "A study of lifetime optimization of silicon and ceramic materials for semiconductor dry etcher," Korea University of Technology & Education, (2016).
  2. S. K. Kim, "A study on the grindability of Fine Ceramics by Experimental Method," Journal of The Semiconductor & Display Technology, Vol. 10, No. 6, pp. 35-42, (2011).
  3. H. S. Rama Iyengar, R. Salmon and W. B. Rice, "Some effects of cutting fluid on chip formation in metal cutting," Journal of Engineering for Industry, Vol. 87, pp. 36-38, (1965). https://doi.org/10.1115/1.3670754
  4. Joon Hwang, Eui-Sik Chung, "A study on the environmentally conscious machining technology cutting fluid atomization and environmental impact in grinding operation (I) ," Journal of the Korean Society of Precision Engineering, Vol. 22, No. 6, pp. 61-69, (2005).
  5. Byme, G., Scholta, E., "Environmentally clean machining process a strategic approach", Annals of the CIRP, Vol. 42, No. 1, pp. 471-474, (1993). https://doi.org/10.1016/S0007-8506(07)62488-3
  6. Cook, N. H., "Tool wear and tool life, Journal of Engineering for Industry," Vol. 95, pp. 931-938, (1973). https://doi.org/10.1115/1.3438271