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Effects of Filtering System of Cutting Fluid on the Surface Quality of Plasma Etching Electrode  

Lee, Eun Young (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education)
Kim, Moon Ki (School of Mechatronics Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.17, no.4, 2018 , pp. 46-50 More about this Journal
Abstract
The purpose of this study is to analyze effects of filtering system of cutting fluid which is used for machining silicon electrode. For the research, different sizes of filter clothes are applied to check grain size of sludge of cutting fluid. Surface roughness of machined workpiece, depth of damage inside of silicon electrode, and suspended solids of cutting fluid are experimented and analyzed. From these experiments, it is verified that filtering system of cutting fluid is very important factor for machining. Results of this study can affect various benefits to the semiconductor industry for better productivity and better atmospheric pollution in workplace.
Keywords
Filtering System; Cutting Fluid; Silicon Electrode; Surface Roughness; Depth of Damage;
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