참고문헌
- S. Ulrich, H. Holleck, J. Ye, H. Leiste, R. Loos, M. Stuber, P. Pesch, S. Sattel, Influence of low energy ion implantation on mechanical properties of magnetron sputtered metastable (Cr,Al)N thin films, Thin Sol. Films 437 (2003) 164-169. https://doi.org/10.1016/S0040-6090(03)00595-9
- J. H. Park, W. S. Chung, Y. R. Cho, K. H. Kim, Synthesis and mechanical properties of Cr-Si-N coatings deposited by a hybrid system of arc ion plating and sputtering techniques, Surf. Coat. Technol 188 (2004) 425-430.
- E. Martinez, R. Sanjines, A. Karimi, J. Esteve, F. Levy, Mechanical properties of nanocomposite and multilayered Cr-Si-N sputtered thin films, Suf. Coat. Technol 180 (2004) 570-574.
- D. Y. Wang, Y. W. Li, W. Y. Ho, Deposition of high quality (Ti,Al)N hard coatings by vacuum arc evaporation process, Surf. Coat. Technol 114 (1999) 109-113. https://doi.org/10.1016/S0257-8972(99)00020-1
- S. Balasubramanian, A. Ramadoss, A. Kobayashi, J. Muthirulandi, Nanocomposite Ti-Si-N coatings deposited by reactive dc magnetron sputtering for biomedical applications, J. Am. Ceram. Soc 95 (2012) 2746-2752. https://doi.org/10.1111/j.1551-2916.2011.05029.x
- M. S. Kang, T. G. Wang, J. H. Shin, R. Nowak, K. H. Kim, Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and DC pulse sputtering, Trans. Nonferrous Met. Soc. China 22 (2012) s729-s734. https://doi.org/10.1016/S1003-6326(12)61795-6
- M. Chen, W. Chen, F. Cai, S Zhang, Q. M. Wang, Structural evolution and electrochemical behaviors of multilayer Al-Cr-Si-N coatings, Surf. Coat. Technol 296 (2016) 33-39. https://doi.org/10.1016/j.surfcoat.2016.04.017
- H. H. Jin, J. W. Kim, K. W. Kim, S. Y. Yoon, The Effect of Si content on the tribological behaviors of Ti-Al-Si-N coating layers, J. Korean Ceram. Soc 42 (2005) 88-93. https://doi.org/10.4191/KCERS.2005.42.2.088
- I. W. Park, D. S. Kang, J. J. Moore, S. C. Kwon, J. J. Rha, and K. H. Kim, Microstructures, mechanical properties, and tribological behaviors of Cr-Al-N, Cr-Si-N, and Cr-Al-Si-N coatings by a hybrid coating system, Surf. Coat. Technol 201 (2007) 5227-5227.
- M. Huang, G. Lin, Y. Zhao, C. Sun, L. Wen, C. Dong, Macro-particle reduction mechanism in biased arc ion plating of TiN, Surf. Coat. Technol 176 (2003) 109-114. https://doi.org/10.1016/S0257-8972(03)00017-3
- C. N. Tai, E. S. Koh, K. Akari, Macroparticles on TiN films prepared by the arc ion plating process, Surf. Coat. Technol 43 (1990) 324-335.
- S. P. Lau, Y. H. Cheng, J. R. Shi, P. Cao, B. K. Tay, X. Shi, Filtered cathodic vacuum arc deposition of thin film copper, Thin Sol. Films 398 (2001) 539-543.
- V. Miikkulainen, M. Leskela, M. Ritala, R. L. Puurunen, Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends, J. Appl. Phys 113 (2013) 021301-021403. https://doi.org/10.1063/1.4757907
- A. S. Alshamsi, Corrosion of heat-treated 304SS in the presence of molybdate ions in hydrochloric acid, Int. J. Electrochem. Sci 8 (2013) 591-605.