참고문헌
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Park, S. J., Lee, B. G., Choi, H. Z., 2004, Micro Hole Machining for Ceramics (
$Al_2O_3$ ) using Ultrasonic Vibration, J. of the KSMTE, 13:2 104-111. - Amanov, A., Pyun, Y., Sasaki, S., 2014, Effects of Ultrasonic Nanocrystalline Surface Modification (UNSM) Technique on the Tribological Behavior of Sintered Cu-based Alloy, Tribology International, 72 187-197. https://doi.org/10.1016/j.triboint.2013.12.003
- Amanov, A., Cho, I. S., Kim, D. E., Pyun, Y. S., 2012, Fretting Wear and Friction Reduction of CP Titanium and Ti-6Al-4V Alloy by Ultrasonic Nanocrystalline Surface Modification, Surface and Coatings Tech., 207 135-142. https://doi.org/10.1016/j.surfcoat.2012.06.046
- Ruirun, C., Deshuang, Z., Jingjie, G., Tengfei, M., Hongsheng, D., Yanqing, S., Hengzhi, F., 2016, A Novel Method for Grain Refinement and Microstructure Modification in TiAl Alloy by Ultrasonic Vibration, Materials Science and Eng. A, 653 23-26. https://doi.org/10.1016/j.msea.2015.12.001
- Bozdana, A. T., Gindy, N., Li, H., 2005, Deep Cold Rolling with Ultrasonic Vibrations-A New Mechanical Surface Enhancement Technique, Int. J. of Machine Tools and Manuf., 45:6 713-718. https://doi.org/10.1016/j.ijmachtools.2004.09.017
- Huuki, J., Laakso, S. V., 2013, Integrity of Surfaces Finished with Ultrasonic Burnishing, J. of Eng. Manuf., 227 45-53. https://doi.org/10.1177/0954405412462805
- Gras, G. G., Rodriguez, J. A. T., Mesa, R. J., Fuentes, J. L., Calle, B. G., 2016, Experimental Study of Lateral Pass Width in Conventional and Vibrations-assisted Ball Burnishing, J. of Eng. Manuf., 227 45-53.
- Li, F. L., Xia, W., Zhou, Z. Y., Zhao, J., Tang, Z. Q., 2012, Analytical Prediction and Experimental Verification of Surface Roughness during the Burnishing Process, Int. J. of Machine Tools and Manuf., 62 67-75. https://doi.org/10.1016/j.ijmachtools.2012.06.001
- Zhao, Q., Sun, Z., Guo, B., 2016, Material Removal Mechanism in Ultrasonic Vibration Assisted Polishing of Micro Cylindrical Surface on SiC, Int. J. of Machine Tools and Manuf., 103 28-39. https://doi.org/10.1016/j.ijmachtools.2016.01.003
- Tsai, M. Y., Yang, W. Z., 2012, Combined Ultrasonic Vibration and Chemical Mechanical Polishing of Copper Substrates, Int. J. of Machine Tools and Manuf., 53:1 69-76. https://doi.org/10.1016/j.ijmachtools.2011.09.009
- Zahedi, A., Tawakoli, T., Akbari, J., 2015, Energy Aspects and Workpiece Surface Characteristics in Ultrasonic-assisted Cylindrical Grinding of Alumina-zirconia Ceramics, Int. J. of Machine Tools and Manuf., 90 16-28. https://doi.org/10.1016/j.ijmachtools.2014.12.002
- Kim, H., Lee, Y., Lim, E., 2009, Design and Fabrication of an L-type Waveguide Megasonic System for Cleaning of Nano-scale Patterns, Current Applied Physics, 9:2 e189-e192. https://doi.org/10.1016/j.cap.2008.12.058
- Kim, H., Lee, Y., Lim, E., 2013, Design and Fabrication of a Horn-type Megasonic Waveguide for Nanoparticle Cleaning, IEEE Transactions on Semiconductor Manuf., 26:2 221-225. https://doi.org/10.1109/TSM.2013.2238563
피인용 문헌
- Fabrication and Performance Tests of an Ultrasonic Cleaning System for Solar-cell Wafers vol.28, pp.4, 2017, https://doi.org/10.7735/ksmte.2019.28.4.210
- Finite Element Analysis and Fabrication of an Ultrasonic Milling System vol.29, pp.5, 2017, https://doi.org/10.7735/ksmte.2020.29.5.353