Applied Science and Convergence Technology

한국진공학회 (The Korean Vacuum Society)
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Approaches to Reduce the Contact Resistance by the Formation of Covalent Contacts in Graphene Thin Film Transistors

  • Na, Youngeun (Integrated Science and Engineering Division, Yonsei University) ;
  • Han, Jaehyun (School of Integrated Technology, Yonsei University) ;
  • Yeo, Jong-Souk (Integrated Science and Engineering Division, Yonsei University)
  • 투고 : 2017.06.22
  • 심사 : 2017.07.30
  • 발행 : 2017.07.31
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초록

Graphene, with a carrier mobility achieving up to $140,000cm^2/Vs$ at room temperature, makes it an ideal material for application in semiconductor devices. However, when the metal comes in contact with the graphene sheet, an energy barrier forms at the metal-graphene interface, resulting in a drastic reduction of the carrier mobility of graphene. In this review, the various methods of forming metal-graphene covalent contacts to lower the contact resistance are discussed. Furthermore, the graphene sheet in the area of metal contact can be cut in certain patterns, also discussed in this review, which provides a more efficient approach to forming covalent contacts, ultimately reducing the contact resistance for the realization of high-performance graphene devices.

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