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유전박막이 도포된 나노원뿔 패턴된 단결정 Si 기판의 광특성

Optical Characteristics of Nanocone-patterned c-Si Wafers Coated with Dielectric Thin Films

  • 김은아 (물리학과, 이화여자대학교) ;
  • 박지민 (물리학과, 이화여자대학교) ;
  • 고은지 (물리학과, 이화여자대학교) ;
  • 김동욱 (물리학과, 이화여자대학교)
  • Kim, Eunah (Department of Physics, Ewha Womans University) ;
  • Park, Jimin (Department of Physics, Ewha Womans University) ;
  • Ko, Eun-Ji (Department of Physics, Ewha Womans University) ;
  • Kim, Dong-Wook (Department of Physics, Ewha Womans University)
  • 투고 : 2017.02.16
  • 심사 : 2017.03.24
  • 발행 : 2017.06.30

초록

We investigated the influences of dielectric thin film coating on the optical characteristics of c-Si wafers with nanocone (NC) arrays using finite-difference time-domain (FDTD) simulations. Dielectric thin films on high-refractive-index surface can lower optical reflection and reflection dips appear at the wavelengths where destructive interference occurs. The optical reflection of the NC arrays was lower than that of the dielectric-coated planar wafer in broad wavelength range. Remarkable antireflection effects of the NC array could be attributed to beneficial roles of the NCs, including the graded refractive index, multiple reflection, diffraction, and Mie resonance. Dielectric thin films modified the optical reflection spectra of the NC arrays, which could not be explained by the interference alone. The optical properties of the dielectric-coated NC arrays were determined by the inherent optical characteristics of the NC arrays.

키워드

참고문헌

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