Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Soft Mold Imprinting Fabrication of Anti-reflection Film using Self-Organized Nanostructure Polymer Surfaces Irradiated by Ion Beams

이온빔 처리된 폴리머 표면의 자가나노구조화를 이용한 반사방지 필름 제조용 소프트 몰드 임프린팅 연구

  • Lee, Seunghun (Surface Technology Department, Korea Institute of Materials Science) ;
  • Byeon, Eun-Yeon (Surface Technology Department, Korea Institute of Materials Science) ;
  • Choi, Juyeon (Surface Technology Department, Korea Institute of Materials Science) ;
  • Jung, Sunghoon (Surface Technology Department, Korea Institute of Materials Science) ;
  • Yu, Byeong-Gil (JPE) ;
  • Kim, Do-Geun (Surface Technology Department, Korea Institute of Materials Science)
  • 이승훈 (재료연구소 표면기술연구본부 플라즈마공정연구실) ;
  • 변은연 (재료연구소 표면기술연구본부 플라즈마공정연구실) ;
  • 최주연 (재료연구소 표면기술연구본부 플라즈마공정연구실) ;
  • 정성훈 (재료연구소 표면기술연구본부 플라즈마공정연구실) ;
  • 유병길 (제이피이) ;
  • 김도근 (재료연구소 표면기술연구본부 플라즈마공정연구실)
  • Received : 2017.12.07
  • Accepted : 2017.12.23
  • Published : 2017.12.31
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Abstract

Soft mold imprinting method that uses nanostructured polymer mold was investigated for anti-reflection film fabrication. The nanostructured soft mold was polyethylene terephthalate(PET) irradiated by oxygen ion beams. The collisional energy transfer between oxygen ion and the polymer surface induced cross-linking and scission reactions, resulting in self-organized nanostructures with regular patterns of the wavenumber of $5{\mu}m^{-1}$. Post processes including ultra-violet curable resin coating and delamination fabricated anti-reflection films. The imprinted resin surface also showed the consistent wavenumber, $5{\mu}m^{-1}$. Pristine PET, oxygen ion beam treated PET, and imprinted replica sample showed total transmittance of 91.04, 93.25, and 93.57-93.88%, respectively.

Keywords

References

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