Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
권호 표지
DOI QR코드

DOI QR Code

Rapid Thermal Annealing at the Temperature of 650℃ Ag Films on SiO2 Deposited STS Substrates

  • Kim, Moojin (Department of Renewable Energy, Jungwon University) ;
  • Kim, Kyoung-Bo (Department of Metallurgical & Materials Engineering, Inha Technical College)
  • Received : 2017.11.10
  • Accepted : 2017.11.28
  • Published : 2017.11.30
Download PDF
⟨ Previous Next ⟩

Abstract

Flexible opto-electronic devices are developed on the insulating layer deposited stainless steel (STS) substrates. The silicon dioxide ($SiO_2$) material as the diffusion barrier of Fe and Cr atoms in addition to the electrical insulation between the electronic device and STS is processed using the plasma enhanced chemical vapor deposition method. Noble silver (Ag) films of approximately 100 nm thickness have been formed on $SiO_2$ deposited STS substrates by E-beam evaporation technique. The films then were annealed at $650^{\circ}C$ for 20 min using the rapid thermal annealing (RTA) technique. It was investigated the variation of the surface morphology due to the interaction between Ag films and $SiO_2$ layers after the RTA treatment. The results showed the movement of Si atoms in silver film from $SiO_2$. In addition, the structural investigation of Ag annealed at $650^{\circ}C$ indicated that the Ag film has the material property of p-type semiconductor and the bandgap of approximately 1 eV. Also, the films annealed at $650^{\circ}C$ showed reflection with sinusoidal oscillations due to optical interference of multiple reflections originated from films and substrate surfaces. Such changes can be attributed to both formation of $SiO_2$ on Ag film surface and agglomeration of silver film between particles due to annealing.

Keywords

References

  1. K. S. Lee, J. W. Shin, J. H. Park, J. H. Lee, C. W. Joo, J. I. Lee, D. H. Cho, J. T. Lim, M. C. Oh, B. K. Ju, and J. H. Moon, A Light Scattering Layer for Internal Light Extraction of Organic Light-Emitting Diodes Based on Silver Nanowires, ACS Appl. Mater. Interfaces 8, 17409 (2016). https://doi.org/10.1021/acsami.6b02924
  2. G. H. Jin, S.M. Choi, M. J. Kim, S. C. Kim, and J. H. Song, New Pixel Circuit Design Employing an Additional Pixel Line Insertion in AMOLED Displays Composed by Excimer Laser-Crystallized TFTs, J. Display Technol. 8, 479 (2012). https://doi.org/10.1109/JDT.2012.2191533
  3. J. Kratochvil, A. Kuzminova, O. Kylian, and H. Biederman, Comparison of magnetron sputtering and gas aggregation nanoparticle source used for fabrication of silver nanoparticle films, Surf. Coat. Technol. 275, 296 (2015). https://doi.org/10.1016/j.surfcoat.2015.05.003
  4. C. Charton and M. Fahland, Optical and electrical properties of sputtered Ag films on PET webs, Surf. Coat. Technol. 142-144, 175 (2001). https://doi.org/10.1016/S0257-8972(01)01148-3
  5. J. Lv, Effect of wettability on surface morphologies and optical properties of Ag thin films grown on glass and polymer substrates by thermal evaporation, Appl. Surf. Sci. 273, 215 (2013). https://doi.org/10.1016/j.apsusc.2013.02.015
  6. A. Inberg, P. Livshits, Z. Zalevsky, and Y. Shacham-Diamand, Electroless deposition of silver thin films on gold nanoparticles catalyst for micro and nanoelectronics applications, Microelectron. Eng. 98, 570 (2012). https://doi.org/10.1016/j.mee.2012.06.020
  7. R. Krajcar, J. Siegel, P. Slepicka, P. Fitl, and V. Svorcik, Silver nanowires prepared on PET structured by laser irradiation, Mater. Lett. 117, 184 (2014). https://doi.org/10.1016/j.matlet.2013.11.112
  8. J. S. Cho, J. S. Yoo, J. H. Park, K. S. Shin, and K. H. Yoon, Fabrication of dc sputtered Ag/Al:Si bilayers with improved optical reflectance, Thin Solid Films 529, 45 (2013). https://doi.org/10.1016/j.tsf.2012.06.026
  9. M. Maqbool, T. Khan, Atomic force microscopy and XRD analysis of silver films deposited by thermal evaporation, Int. J. Mod. Phys. B 20, 217 (2006). https://doi.org/10.1142/S021797920603319X
  10. J. Lin, H. Lan, W. Zheng, Y. Qu, and F. Lai, Silver nanoparticles films deposited on AAO templates by thermal evaporation for surface-enhanced Raman scattering of R6G, Nano 07, 1250048 (2012). https://doi.org/10.1142/S1793292012500488
  11. D. R. Sahu, S. Y. Lin, and J. L. Huang, Study on the electrical and optical properties of Ag/Al-doped ZnO coatings deposited by electron beam evaporation, Appl. Surf. Sci. 253, 4886 (2007). https://doi.org/10.1016/j.apsusc.2006.10.061
  12. Y. Jing, H. Wang, J. Zhao, H. Yi, and X. Wang, Pulsed laser deposition of Ag nanoparticles on titanium hydroxide/oxide nanobelt arrays for highly sensitive surface-enhanced Raman spectroscopy, Appl. Surf. Sci. 347, 499 (2015). https://doi.org/10.1016/j.apsusc.2015.04.127
  13. Z. Yuan, N.H. Dryden, J.J. Vittal, R.J. Puddephatt, Chemical vapor deposition of silver, Chem. Mater. 7, 1696 (1995). https://doi.org/10.1021/cm00057a019
  14. R. Sivasubramanian and M. V. Sangaranarayanan, Electrodeposition of silver nanostructures: from polygons to dendrites, Cryst. Eng. Comm. 15, 2052 (2013). https://doi.org/10.1039/c3ce26886a
  15. S. Kundu, S. Hazra, S. Banerjee, M. K. Sanyal, S. K. Mandal, S. Chaudhuri, and A. K. Pa, Morphology of thin silver film grown by dc sputtering on Si(001), J. Phys. D: Appl. Phys. 31, L73 (1998). https://doi.org/10.1088/0022-3727/31/23/001
  16. W. M. Kim, D. Y. Ku, K. S. Lee, and B. Cheong, Effect of oxygen content and deposition temperature on the characteristics of thin silver films deposited by magnetron sputtering, Appl. Surf. Sci. 257 1, 1331 (2010). https://doi.org/10.1016/j.apsusc.2010.08.061
  17. P. Asanithi, S. Chaiyakun, and P. Limsuwan, Growth of Silver Nanoparticles by DC Magnetron Sputtering, J. Nanomater. 2012, 963609 (2012).
  18. J. Zuo, Deposition of Ag nanostructures on $TiO_{2}$ thin films by RF magnetron sputtering, Appl. Surf. Sci. 256, 7096 (2010). https://doi.org/10.1016/j.apsusc.2010.05.034
  19. L. S. Kibis, A. I. Stadnichenko, E. M. Pajetnov, S. V. Koscheev, V. I. Zaykovskii, and A. I. Boronin, The investigation of oxidized silver nanoparticles prepared by thermal evaporation and radio-frequency sputtering of metallic silver under oxygen, Appl. Surf. Sci. 257, 404 (2010). https://doi.org/10.1016/j.apsusc.2010.07.002
  20. M. J. Kim, K. B. Kim, D. Y. Lee, S. N. Lee, and J. M. Lee, Effects of rapid thermal annealing for E-beam evaporated Ag films on stainless steel substrates, Surf. Coat. Technol. 278, 18 (2015). https://doi.org/10.1016/j.surfcoat.2015.07.073
  21. A. K. Santra, B. K. Min, and D. W. Goodman, Ag clusters on ultra-thin, ordered $SiO_2$ films, Surf. Sci. 515, L475 (2002). https://doi.org/10.1016/S0039-6028(02)01952-0
  22. R. Yu, T. Shibayama, X. Meng, S. Takayanagi, Y. Yoshida, S. Yatsu, and S. Watanabe, Effects of nanosecond-pulsed laser irradiation on nanostructure formation on the surface of thin Au films on $SiO_2$ glass substrates, Appl. Surf. Sci. 289, 274 (2014). https://doi.org/10.1016/j.apsusc.2013.10.149
  23. F. M .F. de Groot, M. Grioni, J. C. Fuggle, J. Ghijsen, G. A. Sawatzky, and H. Petersen, Oxygen 1s x-ray-absorption edges of transition-metal oxides, Phys. Rev. B 40, 5715 (1989). https://doi.org/10.1103/PhysRevB.40.5715
  24. T. Shedel-Niedrig, X. Bao, M. Muhler, and R. Schlogl, Surface-Embedded Oxygen: Electronic Structure of Ag(111) and Cu(poly) Oxidised at Atmospheric Pressure, Ber. Bunsenges. Phys. Chem. 101, 994 (1997). https://doi.org/10.1002/bbpc.19971010703
  25. A. Toneva, Ts. Marinova, and V. Krastev, XPS investigation of a-Si:H thin films after light soaking, J. Lumin. 80, 455 (1999).
  26. M. A. M. Hassan, I. R. Agool, and L. M. Raoof, Silver oxide nanostructure prepared on porous silicon for optoelectronic application, Appl. Nanosci. 4, 429 (2014). https://doi.org/10.1007/s13204-013-0215-z
  27. M. W. Allen, S. M. Durbin, and J. B. Metson, Silver oxide Schottky contacts on n-type ZnO, Appl. Phys. Lett. 91, 053512 (2007). https://doi.org/10.1063/1.2768028
  28. H. K. Kim, T. Y. Seong, K. K. Kim, S. J. Park, Y. S. Yoon, and I. Adesida, Mechanism of Nonalloyed Al Ohmic Contacts to n-Type ZnO:Al Epitaxial Layer, Jpn. J. Appl. Phys. 43, 976 (2004). https://doi.org/10.1143/JJAP.43.976
  29. J. F. Pierson and C. Rousselot, Stability of reactively sputtered silver oxide films, Surf. Coat. Technol. 200, 276 (2005). https://doi.org/10.1016/j.surfcoat.2005.02.005
  30. J. F. Pierson, D. Wiederkehr, and A. Billard, Reactive magnetron sputtering of copper, silver, and gold, Thin Solid Films 478, 196 (2005). https://doi.org/10.1016/j.tsf.2004.10.043
  31. U. K. Barik, S. Srinivasan, C. L. Nagendra, and A. Subrahmanyam, Electrical and optical properties of reactive DC magnetron sputtered silver oxide thin films: role of oxygen, Thin Solid Films 429, 129 (2003). https://doi.org/10.1016/S0040-6090(03)00064-6
  32. A. J. Varkey and A. F. Fort, Some optical properties of silver peroxide (AgO) and silver oxide ($Ag_2O$) films produced by chemical-bath deposition, Sol. Energy Mater. Sol. Cells 29, 253 (1993). https://doi.org/10.1016/0927-0248(93)90040-A
  33. B. E. BreyfogIe, C. J. Hung, M. G. Shumsky, and J. A. Switzer, Electrodeposition of silver(II) oxide films, J. Electrochem. Soc. 143, 2741 (1996). https://doi.org/10.1149/1.1837101
  34. S. B. Rivers, G. Bernhardt, M. W. Wright, D. J. Frankel, M. M. Steeves, and R. J. Lad, Structure, conductivity, and optical absorption of $Ag_{2-x}O$ films, Thin Solid Films 515, 8684 (2007). https://doi.org/10.1016/j.tsf.2007.03.139
  35. F. X. Bock, T. M. Christensen, S. B. Rivers, L. D. Doucette, and R. J. Lad, Growth and structure of silver and silver oxide thin films on sapphire, Thin Solid Films 468, 57 (2004). https://doi.org/10.1016/j.tsf.2004.04.009
  36. Y. Suzuki, Y. Ojima, Y. Fukui, H. Fazyia, and K. Sagisaka, Post-annealing temperature dependence of infrared absorption enhancement of polymer on evaporated silver films, Thin Solid Films 515 (5), 3073 (2007). https://doi.org/10.1016/j.tsf.2006.08.029
  37. J. S. Cho, J. S. Yoo, J. H. Park, K. S. Shin, and K. H. Yoon, Fabrication of dc sputtered Ag/Al:Si bilayers with improved optical reflectance, Thin Solid Films 529 (2013) 45-49. https://doi.org/10.1016/j.tsf.2012.06.026
  38. H. Nakashima, Y. Sasaki, R. Osozawa, Y. Kon, H. Nakazawa, and Y. Suzuki, Surface enhanced infrared absorption spectra on pulsed laser deposited silver island films, Thin Solid Films 536, 166 (2013). https://doi.org/10.1016/j.tsf.2013.03.032
  39. W. Wu, M. Wu, Z. Sun, G. Li, Y. Ma, X. Liu, X. Wang, and X. Chen, Morphology controllable synthesis of silver nanoparticles: Optical properties study and SERS application, J. Alloys and Comp. 579, 117 (2013). https://doi.org/10.1016/j.jallcom.2013.05.044
  40. R. Krajcar, J. Siegel, P. Slepicka, P. Fitl, and V. Svorcik, Silver nanowires prepared on PET structured by laser irradiation, Mater. Lett. 117, 184 (2014). https://doi.org/10.1016/j.matlet.2013.11.112