Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
권호 표지
DOI QR코드

DOI QR Code

Calculation of Pressure Profiles in a Molecular Flow Regime using LTSpice IV

  • Received : 2016.06.07
  • Accepted : 2016.06.30
  • Published : 2016.07.30
Download PDF
⟨ Previous Next ⟩

Abstract

This article describes an electrical network analysis (ENA) method to calculate the pressure distribution of a vacuum system in a molecular flow regime. The vacuum system was modeled using electrical components. For an accurate analysis, a complexly combined pipe model, excluding entrance conductance, was employed and the pressure distribution was simulated using ENA. A vacuum system comprising three vacuum pumps was used for simplicity. In addition, the ENA results were compared with results from finite element analysis (FEA) and experimental measurements. The pressure distribution profiles estimated from ENA, performed using the LTSpice IV software, were in agreement with FEA and experimental results.

Keywords

References

  1. R. Kersevan and J. L. Pons, American Vac. Soc. 27, pp. 1017-1023 (2009).
  2. H. Bannwarth, Liquid Ring Vacuum Pumps, Compressors and Systems (Wiley, 2005), ch. 1.
  3. J. M. Lafferty, Foundations of Vacuum Science and Technology (Wiley, 1998).
  4. J. S. Park, Y. K. Kim, H. S. Oh, and W. Namkung, J. Korean Vac. Soc. 2, 282 (1993).
  5. LTSpice IV program manual (Linear Technology), www.linear.com/designtools/software/ (accessed Dec. 27, 2015).
  6. P. Chiggiato, CERN-2013-007 (CERN Yellow Report, 2013), pp. 463-502.
  7. D. M. Hoffman and B. Singh, Handbook of Vacuum Science and Technology (Academic Press, 1998), pp. 11-39.
  8. S. H. Bae, S. R. In, G. H. Jung, Y. B. Lee, and Y.H. Shin, Vacuum Engineering (The Korean Economic Daily, 2000), pp. 78-80.
  9. A. S. Berman, J. Appl. Phys. 10, 3356 (1965).
  10. C. Yin Vallgren, P. Chiggiato, and J. A. F. Somoza, Report No. ATS-Note-2012-041 (CERN, 2012).
  11. C. Pasquino, P. Chiggiato, and J. Lettry, Report No. ATS-Note-2012-043 (CERN, 2012).
  12. N. Weste, CMOS VLSI Design: A Circuit and Systems Perspective (Addison-Wesley, 2011).
  13. C. D. Park, T. G. Ha, and B. L. Cho, J. Vac. Sci. Technol. A. 34, 021601 (2016).