1 |
R. Kersevan and J. L. Pons, American Vac. Soc. 27, pp. 1017-1023 (2009).
|
2 |
H. Bannwarth, Liquid Ring Vacuum Pumps, Compressors and Systems (Wiley, 2005), ch. 1.
|
3 |
J. M. Lafferty, Foundations of Vacuum Science and Technology (Wiley, 1998).
|
4 |
J. S. Park, Y. K. Kim, H. S. Oh, and W. Namkung, J. Korean Vac. Soc. 2, 282 (1993).
|
5 |
LTSpice IV program manual (Linear Technology), www.linear.com/designtools/software/ (accessed Dec. 27, 2015).
|
6 |
P. Chiggiato, CERN-2013-007 (CERN Yellow Report, 2013), pp. 463-502.
|
7 |
D. M. Hoffman and B. Singh, Handbook of Vacuum Science and Technology (Academic Press, 1998), pp. 11-39.
|
8 |
S. H. Bae, S. R. In, G. H. Jung, Y. B. Lee, and Y.H. Shin, Vacuum Engineering (The Korean Economic Daily, 2000), pp. 78-80.
|
9 |
A. S. Berman, J. Appl. Phys. 10, 3356 (1965).
|
10 |
C. Yin Vallgren, P. Chiggiato, and J. A. F. Somoza, Report No. ATS-Note-2012-041 (CERN, 2012).
|
11 |
C. Pasquino, P. Chiggiato, and J. Lettry, Report No. ATS-Note-2012-043 (CERN, 2012).
|
12 |
N. Weste, CMOS VLSI Design: A Circuit and Systems Perspective (Addison-Wesley, 2011).
|
13 |
C. D. Park, T. G. Ha, and B. L. Cho, J. Vac. Sci. Technol. A. 34, 021601 (2016).
|