Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Fringe Sensitivity of Projection Moire Topography Due to Position of Light Source and Object Distance According to Grating Periods

영사식 무아레 토포그래피에서 격자 주기에 따른 물체거리와 광원의 위치에 대한 무늬 민감도 변화

  • Oh, Hyun Seock (Department of Photonics and Electronics Physics, Hannam University) ;
  • Ju, Yun Jae (Department of Photonics and Sensor, Hannam University) ;
  • Jo, Jae Heung (Department of Photonics and Electronics Physics, Hannam University)
  • 오현석 (한남대학교 공과대학교 광.센서공학과) ;
  • 주윤제 (한남대학교 생명.나노과학대학 광.전자물리학과) ;
  • 조재흥 (한남대학교 공과대학교 광.센서공학과)
  • Received : 2016.01.29
  • Accepted : 2016.02.29
  • Published : 2016.04.25
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Abstract

In projection moire topography, the investigation of fringe sensitivity, which means the change rate of fringe order according to object height, is important and necessary to reduce the measurement error of the shape of an object. Using the fringe sensitivity, the determination of the absolute orders of moire fringes can be performed very easily and rapidly. The important parameters in the determination of absolute orders of fringes are the positions of light source and object, and the grating period in projection moire topography. Among these parameters, the fringe sensitivity due to the transverse motion of the light source and the longitudinal motion of the object according to grating periods are analyzed and compared. As a result, whereas the fringe sensitivity in the transverse-motion method increases linearly and gradually as the distance between light source and imaging sensor increases, the fringe sensitivity due to the longitudinal-motion method decreases dramatically as the distance between imaging lens and object increases. In these methods, the fringe sensitivity and its change increase as the grating period increases.

영사식 무아레 토포그래피에서 실제 물체에 대한 측정오차를 줄이기 위해서는 물체높이에 따른 무늬차수의 변화율인 무늬 민감도에 대한 조사가 필수적이며, 또한 무늬 민감도를 활용을 하면 절대 차수 결정이 매우 편리하고 정확해진다. 영사기를 사용한 영사식 무아레 토포그래피에서 무늬차수를 결정하기 위한 변수는 광원의 위치와 물체의 위치, 격자주기이다. 이 변수들 중에서 광원의 위치를 횡축으로 움직이는 광원 횡축 이동법과 물체를 종축으로 움직인 물체 종축 이동법에 따른 무늬 민감도를 격자주기에 따라 서로 비교하고 이를 분석하였다. 그 결과 광원 횡축 이동법에서 광원과 상검출기 사이의 간격이 클수록 민감도가 높았으나, 물체 종축 이동법에서 물체와 결상렌즈 사이의 거리가 작을수록 민감도가 높았다. 그리고 두 방법에서 격자주기가 작을수록 민감도가 더 높았으며 변수 변화에 따른 무늬 민감도 변화량은 더 컸다.

Keywords

References

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