한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제32권5호
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  • Pages.405-413
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  • 2015
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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부하를 고려한 직선운동유니트의 정밀도 시뮬레이션 기술

Simulation of Motion Accuracy Considering Loads in Linear Motion Units

  • 김경호 (한국기계연구원 초정밀시스템연구실) ;
  • 박천홍 (한국기계연구원 초정밀시스템연구실) ;
  • 오정석 (한국기계연구원 초정밀시스템연구실)
  • Khim, Gyungho (Department of Ultra-precision Machines and Systems, Korea Institute of Machinery and Materials) ;
  • Park, Chun Hong (Department of Ultra-precision Machines and Systems, Korea Institute of Machinery and Materials) ;
  • Oh, Jeong Seok (Department of Ultra-precision Machines and Systems, Korea Institute of Machinery and Materials)
  • 투고 : 2015.04.16
  • 심사 : 2015.04.21
  • 발행 : 2015.05.01
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초록

This paper presents the motion accuracy simulation considering loads such as workpiece weight, cutting force, cogging force of a linear motor, and force caused by misalignment and runout error of a ballscrew in linear motion units. The transfer function method is basically utilized to estimate 5-DOF motion errors, together with the equilibrium equations of force and moment on the table. The transfer function method is modified in order to consider clearance changed according to the loads in the double sided hydrostatic/aerostatic bearings. Then, the analytic model for predicting the 5-DOF motion errors is proposed with the modified transfer function method. Motion errors were simulated under different loading conditions in the linear motion units using hydrostatic, aerostatic, and linear motion bearings, respectively. And the proposed analytic model was verified by comparing the estimated and measured motion errors.

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참고문헌

  1. KIMM, "Development of Platform Technology for Machine Accuracy Simulation," Research Report, No. UCN011-4644.M, 2014.
  2. Park, C. H., Hwang, J. H., Lee, C. H., and Song, C. K., "Development of an Accuracy Simulation Technology for Mechanical Machines," J. Korean Soc. Precis. Eng., Vol. 28, No. 3, pp. 259-264, 2011.
  3. Oh, J. S., Khim, G., Park, C. H., Chung, S. J., Lee, S. K., et al., "Accuracy Simulation of the Precision Linear Motion Systems," J. Korean Soc. Precis. Eng., Vol. 28, No. 3, pp. 275-284, 2011.
  4. Park, C. H., Lee, H., Kim, T. H., and Kim, M. G, "Finite Element Analysis on the Motion Accuracy of Hydrostatic Table(2nd. Analysis and Experimental Verification on Double Sides Table)," J. Korean Soc. Precis. Eng., Vol. 19, No. 1, pp. 65-70, 2002.
  5. Park, C. H., Oh, Y. J., Lee, C. H., and Hong, J. H., "Theoretical Verification on the Motion Error Analysis Method of Hydrostatic Bearing Tables Using a Transfer Function," Int. J. Korean Soc. Precis. Eng., Vol. 4, No. 2, pp. 64-70, 2003.
  6. Khim, G., Park, C. H., Shamoto, E., and Kim, S. W., "Prediction and Compensation of Motion Accuracy in a Linear Motion Bearing Table," Precision Engineering, Vol. 35, No. 3, pp. 393-399, 2011. https://doi.org/10.1016/j.precisioneng.2010.12.006
  7. Oh, J. S., Khim, G., Oh, J. S., and Park, C. H., "Precision Measurement of Rail Form Error in a Closed Type Hydrostatic Guideway," Int. J. Precis. Eng. Manuf., Vol. 13, No. 10, pp. 1853-1859, 2012. https://doi.org/10.1007/s12541-012-0243-8
  8. Khim, G., Oh, J. S., and Park, C. H., "Analysis of 5- DOF Motion Errors Influenced by the Guide Rails of an Aerostatic Linear Motion Stage," Int. J. Precis. Eng. Manuf., Vol. 15, No. 2, pp. 283-290, 2014. https://doi.org/10.1007/s12541-014-0336-7