Applied Microscopy

Korean Society of Microscopy (한국현미경학회)
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High Speed and Sensitive X-ray Analysis System with Automated Aberration Correction Scanning Transmission Electron Microscope

  • Inada, Hiromi (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Hirayama, Yoichi (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Tamura, Keiji (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Terauchi, Daisuke (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Namekawa, Ryoji (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Shichiji, Takeharu (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Sato, Takahiro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Suzuki, Yuya (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Ohtsu, Yoshihiro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Watanabe, Keitaro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Konno, Mitsuru (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Tanaka, Hiroyuki (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Saito, Koichiro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Shimoyama, Wataru (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Nakamura, Kuniyasu (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Kaji, Kazutoshi (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation) ;
  • Hashimoto, Takahito (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
  • Received : 2015.03.03
  • Accepted : 2015.03.24
  • Published : 2015.03.30
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Abstract

We have developed a new HD-2700 (Hitachi High-Technologies Corp., Japan) scanning transmission electron microscope (STEM) that includes an automatic aberration correction function, and a large-solid-angle energy-dispersive X-ray spectroscopy detector that enables high-resolution and sensitive analysis. For observation with atomic resolution, using spherical-aberration-corrected STEM, in order that satisfactory performance of the device can be achieved readily, and within a short time, irrespective of the operator's skill level, a spherical-aberration-correction device with an automatic aberration-correction function was developed. This automatic aberration-correction function carries out the entire correction-related process (aberration measurement, selection and correction) automatically, with automatic selection of the aberrations that require correction, and automatic measurement of the appropriate corrections.

Keywords

References

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