참고문헌
- Yang, R., Jouaneh, M., and Schweizer, R., "Design and Characterization of a Low-Profile Micropositioning Stage," Precision Engineering, Vol. 18, No. 1, pp. 20-29, 1996. https://doi.org/10.1016/0141-6359(95)00032-1
- Chen, M.-Y., Huang, S.-C., Hung, S.-K., and Fu, L.- C., "Design and Implementation of a New Six-Dof Maglev Positioner with a Fluid Bearing," IEEE/ASME Transactions on Mechatronics, Vol. 16, No. 3, pp. 449-458, 2011. https://doi.org/10.1109/TMECH.2011.2121917
- Chang, S. and Du, B., "A Precision Piezodriven Micropositioner Mechanism with Large Travel Range," Review of Scientific Instruments, Vol. 69, No. 4, pp. 1785-1791, 1998. https://doi.org/10.1063/1.1148842
- Yao, Q., Dong, J., and Ferreira, P. M., "Design, Analysis, Fabrication and Testing of a Parallel- Kinematic Micropositioning XY Stage," International Journal of Machine Tools and Manufacture, Vol. 47, No. 6, pp. 946-961, 2007. https://doi.org/10.1016/j.ijmachtools.2006.07.007
- Moon, J. H., Park, J. H., and Pahk, H. J., "Design and Modeling of a 6-dof Stage for Ultra-Precision Positioning," J. Korean. Soc. Precis. Eng., Vol. 26, No. 6, pp. 106-113, 2009.
- Kim, H. S., Cho, Y. M., and Moon, J. H., "Active vibration control using a Novel Three-Dof Precision Micro-Stage," Smart Materials and Structures, Vol. 19, No. 5, Paper No. 055001, 2010.
- Shin, H., Lee, S., Jeong, J. I., and Kim, J., "Antagonistic Stiffness Optimization of Redundantly Actuated Parallel Manipulators in a Predefined Workspace," IEEE/ASME Transactions on Mechatronics, Vol. 18, No. 3, pp. 1161-1169, 2013. https://doi.org/10.1109/TMECH.2012.2198224
- Choi, K.-B. and Lee, J. J., "Passive Compliant Wafer Stage for Single-Step Nano-Imprint Lithography," Review of Scientific Instruments, Vol. 76, No. 7, Paper No. 075106, 2005.
- Choi, S., Han, S., and Lee, Y., "Fine Motion Control of a Moving Stage using a Piezoactuator Associated with a Displacement Amplifier," Smart Materials and Structures, Vol. 14, No. 1, Paper No. 222, 2005.
- Liang, Q., Zhang, D., Chi, Z., Song, Q., Ge, Y., and Ge, Y., "Six-Dof Micro-Manipulator based on Compliant Parallel Mechanism with Integrated Force Sensor," Robotics and Computer-Integrated Manufacturing, Vol. 27, No. 1, pp. 124-134, 2011. https://doi.org/10.1016/j.rcim.2010.06.018