대한기계학회논문집B (Transactions of the Korean Society of Mechanical Engineers B)

  • 제39권3호
  • /
  • Pages.253-260
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  • 2015
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  • 1226-4881(pISSN)
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  • 2288-5324(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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난류형 클린룸에서 영역분할법을 이용한 오염원 추정에 관한 연구

Zoning Method to Predict Contaminant Sources in Turbulent-Type Cleanroom

  • 김동권 (성균관대학교 기계공학부) ;
  • 성하금 (성균관대학교 기계공학부) ;
  • 한상목 (한국조선해양기자재시험연구원) ;
  • 황영규 (성균관대학교 기계공학부)
  • Kim, D.K. (Dept. of Mechanical Engineering, Sungkyunkwan Univ.) ;
  • Sung, H.G. (Dept. of Mechanical Engineering, Sungkyunkwan Univ.) ;
  • Han, S.M. (Korea Marine Equipment Research Institute) ;
  • Hwang, Y.K. (Dept. of Mechanical Engineering, Sungkyunkwan Univ.)
  • 투고 : 2014.10.07
  • 심사 : 2014.10.21
  • 발행 : 2015.03.01
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초록

클린룸 내부에서 발생한 오염은 복잡한 공정과 여러 가지 장비에 의해서 더욱 더 복잡한 형태를 나타내며, 다양한 오염 형태로 나타나게 된다. 이러한 경향으로 인해서 클린룸 내부에서 발생한 오염입자를 생산공정에 영향을 주지 않으면서 경제적이고 효율적으로 제어하기 위해서, 오염입자 분포에 대한 상세한 해석이 요구된다. 따라서 이러한 오염제어의 목적으로 오염원 추정법이 개발되었다. 본 논문에서는 기여도를 추정하기 위한 계산 가속화 방법으로 영역분할법을 제안하였다. 이 결과로부터 각 오염원의 오염 발생량을 정량적으로 예측할 수 있었다.

Particle contamination in a cleanroom is very complex with a complicated process and several pieces of spreading equipment. Detailed information on the locations of the contamination sources and the path of the contamination is needed for economical and efficient control of the contaminant particles in such a cleanroom. An allocation method was developed to quantitatively predict the contamination generated from the pollution sources. In this paper, we propose a zoning method to accelerate the computation time for estimating the contributions. Our results showed that we can quantitatively estimate the amount of contamination generated from pollution sources.

키워드

참고문헌

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