마이크로전자및패키징학회지 (Journal of the Microelectronics and Packaging Society)

  • 제22권4호
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  • Pages.25-29
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  • 2015
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  • 1226-9360(pISSN)
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  • 2287-7525(eISSN)
한국마이크로전자및패키징학회 (The Korean Microelectronics and Packaging Society)
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유연 기판을 이용한 PLC소자 제작을 위한 롤투롤 공정 연구

PLC Devices Fabricated on Flexible Plastic Substrate by Roll-to-Roll Imprint Lithography

  • 강호주 (부산대학교 인지메카트로닉스공학과) ;
  • 김태훈 (부산대학교 인지메카트로닉스공학과) ;
  • 정명영 (부산대학교 인지메카트로닉스공학과)
  • Kang, Ho Ju (Department of Cogno-Mechatronics Engineering, Pusan National University) ;
  • Kim, Taehoon (Department of Cogno-Mechatronics Engineering, Pusan National University) ;
  • Jeong, Myung Yung (Department of Cogno-Mechatronics Engineering, Pusan National University)
  • 투고 : 2015.08.31
  • 심사 : 2015.12.24
  • 발행 : 2015.12.30
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⟨ 이전 논문 다음 논문 ⟩

초록

저가격, 높은 생산성, 고해상도를 가지는 소자의 패턴 제작 방법에 대한 요구가 계속적으로 증가하고 있다. 롤투롤 연속생산 공정은 저비용, 대량생산이 가능한 차세대 공정으로 각광받고 있다. 본 논문에서는 PLC (planar lightwave circuit) 소자의 제작을 위해서 롤투롤 공정을 이용하여 제조하는 방법을 연구하였다. 제안한 기술은 polydimethylsiloxane (PDMS) 고분자를 이용하여 롤투롤 공정을 통해 PLC소자를 제작하는 공정을 연구하였다. 실리콘 웨이퍼에 형성된 마이크로 패턴을 복제 공정을 수행하였으며 이를 원통금형에 적용하여 롤투롤 공정의 롤 몰드(roll mold)로 사용하였다. 웹 텐션과 웹 속도의 공정 조건 최적화로 롤투롤 공정을 이용하여 PLC소자를 제작하였다. 제작된 PLC소자는 약4.0dB의 삽입손실을 가지는 $1{\times}2$ 광분배기이며, 제안한 롤투롤 공정 기술을 이용한 PLC소자의 제작 공정이 대량연속생산에 유효함을 확인하였다.

Demand for a low-cost, high-throughput, and high-resolution patterning method for fabricating devices continues to increase. The roll-to-roll (R2R) imprint lithography technique has received a great deal of attention as a means of fabricating next-generation devices. In this paper, we propose a fabrication method for polymeric planar lightwave circuit (PLC) devices that uses R2R imprint lithography. The proposed technique uses an elastomeric polydimethylsiloxane (PDMS) mold. A Si wafer with micro patterns is used as the Si master. The PDMS mold is then replicated from the Si master. By applying a precise web tension and at a given web speed, we fabricated a micro-patterned PLC device. The insertion losses were 4.0 dB for a $1{\times}2$ optical splitter. As such, the proposed method of fabricating a PLC device by the R2R process was shown to be an effective solution.

키워드

참고문헌

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피인용 문헌

  1. High-performance flexible waveguide-integrated photodetectors vol.5, pp.1, 2018, https://doi.org/10.1364/OPTICA.5.000044
  2. High-speed Sintering of Ag-based Composite Ink by Nano-soldering vol.36, pp.2, 2015, https://doi.org/10.5781/jwj.2018.36.2.2
  3. InP계 리지 도파로 구조에서 활성층-수동층 버트 조인트의 광결합 효율 최적화 연구 vol.27, pp.4, 2015, https://doi.org/10.6117/kmeps.2020.27.4.047
  4. Deformation Analysis of Roll Mold for Nano-flexible Devices vol.28, pp.4, 2021, https://doi.org/10.6117/kmeps.2021.28.4.047