References
- Luo. X., Cheng. K., Webb. D., and Wardle. F., "Design of Ultraprecision Machine Tools with Applications to Manufacture of Miniature and Micro Components", J. Materials Processing Technology, Vol. 167, No. 2-3, pp. 515-528, 2005. https://doi.org/10.1016/j.jmatprotec.2005.05.050
- Oh. J. S., Kim. C. , Park. C. H., and Choi. Y. J., "Current Status and Technical Issues of Ultra-precision Machine Tools", J. Korean Soc. Precis. Eng., Vol. 31, No. 3, pp. 189-197, 2014 https://doi.org/10.7736/KSPE.2014.31.3.189
- Mckeown. P. A., "The Role of Precision Engineering in manufacturing of the Future", Ann. CIRP, Vol. 36, pp. 495-501, 1987. https://doi.org/10.1016/S0007-8506(07)60751-3
- Taniguchi. N.,Nanotechnology, Oxford University Press, NewYork, 1996.
- Xia. Y., Whitesides. G. M., "Sofe Lithography", Angew. Chem. int. Ed., Vol. 37, pp. 550-575, 1998. https://doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
- Schife. H., Jaszewski. R. W., David. C., and Gobrecht. J., "Nanostructuring of Polymers and Fabrication of Interdigitated Electrodes by Hot Embossing Lirhography", Microelectron. Eng., Vol. 46, pp. 121-124, 1999. https://doi.org/10.1016/S0167-9317(99)00030-1
- Gottschalch. F., Hoffmann. T., Torres. C. M. S., Schulz. H., and Scheer. H. C., "polymer Issues in Nanoimprinting Technique", Solid State Electron., Vol. 43, pp. 1079-1083, 1999. https://doi.org/10.1016/S0038-1101(99)00028-3
- Snow. E. S., and Campbell. P. M., "Fabrication of Si nanostructures with an Atomic Force microscope", Appl. Phys. Lett., Vol. 64, pp. 1932-1934, 1994. https://doi.org/10.1063/1.111746
- Minne. S. C., Adams. J. D., Yaralioglu. G., Manalis. S. R., Atalar. A., and Quate. C. F., "Centimeter Scale Atomic Force microscope Imaging and Lithography", Appl. Phys. Lett., Vol. 73, pp. 1742-1744, 1998. https://doi.org/10.1063/1.122263
- Marrian. C. R. K., Perkins. F. K., Brandow. S. L., Koliski. T. S., Dobisz. E. A., and Calvert. J. M, "Low Voltage Electron Beam Lithography in Self-assembled Ultrathin Films with the Scanning Tunneling Microscope", Appl. Phys. Lett., Vol. 64, pp. 390-392, 1994. https://doi.org/10.1063/1.111157
- Ivanisevic. A., and Mirkin. C. A, "Dip-Pen Nanolithography on Semiconductor Surfaces", J. Am. Chem. Soc., Vol. 123, pp. 7887-7889, 2001. https://doi.org/10.1021/ja010671c
- Polmear, I. J., Light Alloys: Metallurgy of the Light Metals (3rd ed.), Butterworth-Heinemann, 1995.
- Lee. E. S., and Kim. C. G., "A Study on Machinig Characteristics of the Electropolishing of Aluminum alloy", Transactions of the KSMTE., Vol. 12, No. 2, pp. 17-22, 2003.
- Datta. A., Nam. K. T., Kim. S. h.,, and Kim. K. B., "Optimization of Al Interlayer Thickness for the Multilayer Diffusion Barrier Scheme in Cu Metallization", Journal of applied physics, Vol. 92, No. 2, pp. 1099-1105. 2002. https://doi.org/10.1063/1.1486039
- Graciaa. A., Lachaise. J., and MorelG. G., "Optimal Phase Behavior of Water Oilblend/surfactant Systems", Prog. colloid polym. sci., Vol. 93, pp. 257-260, 1993. https://doi.org/10.1007/BFb0118539
- Park. R. Y., and Kim. Y. H., "The Effects of Interfacial Properties of the Styrene/Water on the Styrene Latex Particle Properties using Triton X-100/SDS Surfactant Mixture", J. of the Korean Oil Chemists. Soc., Vol. 27, No. 3, pp. 240-248, 2010.