Fabrication of uniform micropattern arrays using nonionic surfactant-based wet etching process of high purity aluminum |
Jang, Woong-Ki
(Dep. of Mechatronics Engineering, Kangwon National University)
Jeon, Eun Chae (Dep. of Nano Manufacturing Technology, KIMM) Choi, Doo Sun (Dep. of Nano Manufacturing Technology, KIMM) Kim, Byeong Hee (Dep. of Mechatronics Engineering, Kangwon National University) Seo, Young Ho (Dep. of Mechatronics Engineering, Kangwon National University) |
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