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딤플 패턴이 있는 실리콘 표면의 마찰특성

Frictional Characteristics of Silicon Surface with Micro-dimple Pattern

  • 유신성 (연세대학교 기계공학부) ;
  • 허윤영 (연세대학교 무한내마모연구단) ;
  • 김대은 (연세대학교 기계공학부)
  • 투고 : 2014.03.10
  • 심사 : 2014.04.21
  • 발행 : 2014.05.01

초록

Surface roughness of mechanical components is an important factor which affects the tribological phenomena. Various surface patterns have been applied to surfaces to improve the tribological characteristics of mechanical components. In this work, the friction reduction effect of micropatterns on silicon was investigated. For this purpose, micro-dimple patterns were fabricated on silicon wafer by DRIE process. In the friction experiments silicone oil was used as lubricant. Also, the lubricant was cleaned to simulate a lubricant depleted condition. In depleted lubricated condition, friction coefficient of micro-pattern specimens was lower than specimens without micro-patterns. It was found that friction reduction effect of micro-pattern could be successfully maintained even after cleaning the lubricant on the surface.

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참고문헌

  1. Baumgart, P., Krajnovich, D., Nguyen, T., and Tam, A., "A New Laser Texturing Technique for High Performance Magnetic Disk Drives," Magnetics, Vol. 31, No. 6, pp. 2946-2951, 1995. https://doi.org/10.1109/20.490199
  2. Lee, S. C., Chung, K. H., and Kim, D. E., "A Study on the Surface Damage between Head/Disk Interfaces by using AFM," J. Korean Soc. Precis. Eng., Vol. 15, No. 9, pp. 167-174, 1998.
  3. Kim, D. E., Chung, K. H., and Cha, K. H., "Tribological Design Methods for Minimum Surface Damage of HDD Slider," Tribology International, Vol. 36, No. 4, pp. 467-473, 2003. https://doi.org/10.1016/S0301-679X(02)00236-0
  4. Kim, D., Cha, K., Sung, I., and Bryan, J., "Design of Surface Micro-structures for Friction Control in Micro-systems Applications," CIRP Annals- Manufacturing Technology, Vol. 51, No. 1, pp. 495- 498, 2002. https://doi.org/10.1016/S0007-8506(07)61569-8
  5. Wakuda, M., Yamauchi, Y., Kanzaki, S., and Yasuda, Y., "Effect of Surface Texturing on Friction Reduction between Ceramic and Steel Materials under Lubricated Sliding Contact," Wear, Vol. 254, No. 3, pp. 356-363, 2003. https://doi.org/10.1016/S0043-1648(03)00004-8
  6. Pettersson, U. and Jacobson, S., "Influence of Surface Texture on Boundary Lubricated Sliding Contacts," Tribology International, Vol. 36, No. 11, pp. 857-864, 2003. https://doi.org/10.1016/S0301-679X(03)00104-X
  7. Pettersson, U. and Jacobson, S., "Friction and Wear Properties of Micro Textured DLC Coated Surfaces in Boundary Lubricated Siding," Proc. of the ASIATRIB International Conference, Vol. 17, No. 3, pp. 553-559, 2002.
  8. Varenberg, M. and Gorb, S. N., "Hexagonal Surface Micropattern for Dry and Wet Friction," Advanced Materials, Vol. 21, No. 4, pp. 483-486, 2009. https://doi.org/10.1002/adma.200802734
  9. Jung, Y. C. and Bhushan, B., "Contact Angle, Adhesion and Friction Properties of Micro-and Nanopatterned Polymers for Superhydrophbicity," Nanotechnology, Vol. 17, No. 19, pp. 4970-4980, 2006. https://doi.org/10.1088/0957-4484/17/19/033
  10. Yoo, S. S. and Kim, D. E., "Friction Reduction Properties of Evaporation Coated Petroleum and Silicone Oil Lubricants," J. Korean Soc. Precis. Eng., Vol. 30, No. 8, pp. 864-869, 2013. https://doi.org/10.7736/KSPE.2013.30.8.864
  11. Yoo, S. S. and Kim, D. E., "Minimum Lubrication Technique using Silicone Oil for Friction Reduction of Stainless Steel," Int. J. Precis. Eng. Manuf., Vol. 14, No. 6, pp. 875-880, 2013. https://doi.org/10.1007/s12541-013-0115-x