한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제31권5호
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  • Pages.451-457
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  • 2014
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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Frictional Characteristics of Silicon Surface with Micro-dimple Pattern

  • 유신성 (연세대학교 기계공학부) ;
  • 허윤영 (연세대학교 무한내마모연구단) ;
  • 김대은 (연세대학교 기계공학부)
  • 투고 : 2014.03.10
  • 심사 : 2014.04.21
  • 발행 : 2014.05.01
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초록

Surface roughness of mechanical components is an important factor which affects the tribological phenomena. Various surface patterns have been applied to surfaces to improve the tribological characteristics of mechanical components. In this work, the friction reduction effect of micropatterns on silicon was investigated. For this purpose, micro-dimple patterns were fabricated on silicon wafer by DRIE process. In the friction experiments silicone oil was used as lubricant. Also, the lubricant was cleaned to simulate a lubricant depleted condition. In depleted lubricated condition, friction coefficient of micro-pattern specimens was lower than specimens without micro-patterns. It was found that friction reduction effect of micro-pattern could be successfully maintained even after cleaning the lubricant on the surface.

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참고문헌

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