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http://dx.doi.org/10.7736/KSPE.2014.31.5.451

Frictional Characteristics of Silicon Surface with Micro-dimple Pattern  

Yoo, Shin Sung (School of Mechanical Engineering, Yonsei Univ.)
Heo, Yoon-Young (Center for Nano-Wear, Yonsei Univ.)
Kim, Dae-Eun (School of Mechanical Engineering, Yonsei Univ.)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.5, 2014 , pp. 451-457 More about this Journal
Abstract
Surface roughness of mechanical components is an important factor which affects the tribological phenomena. Various surface patterns have been applied to surfaces to improve the tribological characteristics of mechanical components. In this work, the friction reduction effect of micropatterns on silicon was investigated. For this purpose, micro-dimple patterns were fabricated on silicon wafer by DRIE process. In the friction experiments silicone oil was used as lubricant. Also, the lubricant was cleaned to simulate a lubricant depleted condition. In depleted lubricated condition, friction coefficient of micro-pattern specimens was lower than specimens without micro-patterns. It was found that friction reduction effect of micro-pattern could be successfully maintained even after cleaning the lubricant on the surface.
Keywords
Friction Reduction; Silicon Surface; Silicone Oil Lubricant; Micro-dimple Pattern;
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Times Cited By KSCI : 2  (Citation Analysis)
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