센서학회지 (Journal of Sensor Science and Technology)

  • 제22권6호
  • /
  • Pages.433-438
  • /
  • 2013
  • /
  • 1225-5475(pISSN)
  • /
  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
권호 표지
DOI QR코드

DOI QR Code

실리콘 태양전지의 피라미드와 반구형 표면 조직화

Pyramid and Half-Sphere Type of Surface Texturing for Si-Solar Cell

  • 표대승 (경북대학교 전자전기컴퓨터학부) ;
  • 조준환 (경북대학교 전자전기컴퓨터학부) ;
  • 홍표환 (경북대학교 전자전기컴퓨터학부) ;
  • 이종현 (경북대학교 전자전기컴퓨터학부) ;
  • 김봉환 (대구가톨릭대학교 전자공학과) ;
  • 조찬섭 (경북대학교 산업전자전기공학부)
  • Pyo, Dae-Seong (Shool of Electronics Engineering, Kyungpook National University) ;
  • Jo, Jun-Hwan (Shool of Electronics Engineering, Kyungpook National University) ;
  • Hong, Pyo-Hwan (Shool of Electronics Engineering, Kyungpook National University) ;
  • Lee, Jong-Hyun (Shool of Electronics Engineering, Kyungpook National University) ;
  • Kim, Bonghwan (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Cho, Chan-Seob (Shool of Electrical Engineering, Kyungpook National University)
  • 투고 : 2013.08.14
  • 심사 : 2013.10.15
  • 발행 : 2013.11.29
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about $1{\mu}m$ pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.

키워드

참고문헌

  1. J. S. Lee and G. H. Kim, "Solar cell engineering", pp. 22-28, 2007.
  2. H. O. Jumg, "Improvement of silicon solar cell efficiency according to pyramid structure and antireflection coating process condition", Master's Thesis, Kyungbook National University, Daegu, Korea, 2013.
  3. Y. Inomate, K. Fukui, and K. Shirasawa, 'Surface texturing of large area multi crystalline silicon solar cells using reactive ion etching method", Solar Energy Materials and Solar Cell, Vol. 48, pp. 237-242, 1997. https://doi.org/10.1016/S0927-0248(97)00106-2
  4. H. F. W. Dekkers, F. Duerinckx, J. Szlufcik, and J. NIJS, "Silicon surface texturing by reactive ion etching", Opto-electronics review, Vol. 8 pp. 311-316, 2000.
  5. V. Y. Yerokhov, R. Hezel, M. Lipinski, R. Ciach, H. Nagel, A. Mylyanych, and P. Panek, "Cost-effective methods of texturing for silicon solar cells", Solar Energy Materials & Solar Cells, Vol. 72, pp. 291-298, 2002. https://doi.org/10.1016/S0927-0248(01)00177-5
  6. T. Juvonen, J. Harkonen, and P. Kuivalainen, "High efficiency single crystalline silocon solar cells", Physica Scripta, Vol. T101, pp.96-98, 2002. https://doi.org/10.1238/Physica.Topical.101a00096
  7. B. O. Cho, J. H. Ryu, S. W. Hwang, G. R. Lee, and S. H. Moon, "Direct pattern etching for micromachining applications without the use of a resist mask", J. Vac. Sci Technol. B, Vol. 18, pp. 2769-2773, 2000. https://doi.org/10.1116/1.1322044
  8. G. Y. Yeum, "Plasma etching technique", pp. 249-264, 2006.
  9. J. S. Yoo, I. O. Parm, U. Gangopadhyay, K. H. Kim, S. K. Dhungel, D. Mangalaraj, and J. S. Yi, "Black silicon layer formation for application in solar cells", Solar Energy Materials & Solar Cells, Vol. 90, pp. 3085-3093, 2006. https://doi.org/10.1016/j.solmat.2006.06.015