Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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The Effect of Ultrasonic Vibration Table on ELID Grinding Process of Aluminum Nitride Ceramics

초음파 진동 테이블이 질화알루미늄 세라믹의 ELID 연삭 가공에 미치는 영향

  • Kwak, Tea-Soo (Department of Mechanical Engineering, Gyeongnam National University of Science and Technology) ;
  • Jung, Myung-Won (Department of Mechanical Engineering, Gyeongnam National University of Science and Technology) ;
  • Kim, Geon-Hee (Center for Analytical Instrumentation Development, Korea Basic Science Institute) ;
  • Kwak, Ihn-Sil (Faculty of Marine Technology, Chonnam National University)
  • 곽태수 (경남과학기술대학교 기계공학과) ;
  • 정명원 (경남과학기술대학교 기계공학과) ;
  • 김건희 (한국기초과학지원연구원 첨단장비개발사업단) ;
  • 곽인실 (전남대학교 해양기술학부)
  • Received : 2013.11.12
  • Accepted : 2013.11.18
  • Published : 2013.12.01
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Abstract

This study has focused on the effect of ultrasonic vibration table in ELID grinding process of aluminum nitride ceramics. Aluminum nitride ceramics has superior physical and chemical properties and widely used in IC, LSI substrate, package and so on. To achieve the high effective machining of brittle and high strength ceramics as like aluminum nitride, machining method combined ELID grinding and ultrasonic vibration has been adopted in this study. From the experimental results, material removal rate, MRR has been increased maximum 36 percent and spindle resistance has been decreased in using ultrasonic table. Surface roughness of ground surface became a little worse in using ultrasonic table but was somewhat improved in feed direction.

Keywords

References

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  2. Development of Auto-Control Power Supply of ELID Electrolysis Speed for Metal-Bonded Grinding Wheel vol.33, pp.11, 2016, https://doi.org/10.7736/KSPE.2016.33.11.899